Production of improved SiC and SiCN ceramics from polycarbosilane and polysilazane composites

Blugan, Gurdial; Dalcanale, Federico; Kuebler, Jakob

doi:10.1063/1.5045899

Cited by 3 publications

(1 citation statement)

References 18 publications

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“…More recently, de Hazan used stereolithography to selectively crosslink allyl carbosilane resins with different ratios of acrylate monomers to control nano-porosity [11]. In previous studies in our labs, we used maskless lithography based on a micro-mirror array with filtered Hg-lamp source to produce single and multi-layer SiCN components with sub 100 µm features [24,25]. In this paper, we investigated three different laser systems with rastering scanner heads in an attempt to produce ceramics with similar or possibly better resolution.…”

Section: Introductionmentioning

confidence: 99%

Pulsed UV Laser Processing of Carbosilane and Silazane Polymers

Blugan

Kuebler

2019

Materials

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Freestanding SiCNO ceramic pieces with sub-mm features were produced by laser crosslinking of carbosilane and silazane polymer precursors followed by pyrolysis in inert atmosphere. Three different pulsed UV laser systems were investigated, and the influence of laser wavelength, operating power and scanning speed were all found to be important. Different photoinitiators were tested for the two lasers operating at 355 nm, while for the 266 nm laser, crosslinking occurred also without photoinitiator. Pre-treatment of glass substrates with fluorinated silanes was found to ease the release of green bodies during solvent development. Polymer crosslinking was observed with all three of the laser systems, as were bubbles, surface charring and in some cases ablation. By focusing the laser beam several millimeters above the surface of the resin, selective polymer crosslinking was observed exclusively.

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Section: Introductionmentioning

confidence: 99%

Pulsed UV Laser Processing of Carbosilane and Silazane Polymers

Blugan

Kuebler

2019

Materials

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Polymer‐Derived High‐Temperature Nonoxide Materials: A Review

Zhou

2023

Adv Eng Mater

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The synthesis of polymer-derived nonoxide materials such as carbides, borides, and nitrides started in the 1970s and slowly progressed into the 1980s, with silicon carbide (SiC) fibers as the prime examples. [1] In the 1990s, the research activities in this area became more intensive, with multiple efforts devoted to understanding the polymer-to-ceramic conversion mechanisms, resulting microstructures, and mechanical properties. In the 2000s, relying on the liquid precursor nature and advancement in chemistry, new techniques (e.g., electrospinning, coating, and precursor infiltration) and new precursors were introduced. Understanding of the crosslinking and thermal conversion process was improved. For example, SiC fibers were improved from amorphous silicon oxycarbide (SiOC) to low-oxygen SiC fibers and then to near-stoichiometric SiC fibers. SiC thin films of 8-190 μm thickness were reported in 2009. [2] These films can stand alone, and high mechanical properties and optoelectronic properties were achieved. Because of these advantages, they were proposed to be used in microelectromechanical systems (MEMS) and optoelectronic devices. In recent decades, additive manufacturing was used to form complex shapes. [3] Also, different one-pot precursor synthesis approaches were reported. [4] The pyrolyzed ceramic systems were frequently used in a powder format and can be further processed with traditional forming processes such as spark plasma sintering, hot pressing, thermal treatment, etc. [5,6] The advantages of using the polymerderived approach for such high-temperature nonoxide material formations involve several aspects. Compositions can be designed based on molecular-level interactions and conversion of polymeric precursors to composites. Through a synergistic selection and combination of polymer molecules of different architectures and additives, a large family of functional, structural, resilient, and versatile materials can be created. Pyrolysis conditions can also be varied to create different property systems. Species intermixing can be achieved at the true atomic level. It enables functional properties for inert systems and harsh environmental stability for far-from-equilibrium conditions. Additional advantages include low processing temperature (such as a few hundred degrees Celsius lower) and versatile shape achievement. The final materials can be fibers, coatings, membranes, powders, bulk parts, porous forms, infiltrating phases, and complex 3D-printed shapes, [3a] among others. Using the polymer-derived approach to form high-temperature ceramics also enables composition homogeneity and purity, thanks to the uniform mixing of different precursors and additives and high-purity chemical precursors. It can also create compositions that may be impossible with conventional routes, [7] such as sintering.The common challenges are as follows. Polymer-derived nonoxide composites are in a metastable state. At high temperatures, the composition and microstructure can continue to evolve and

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Maskless lithography of silazanes for fabrication of ceramic micro-components

Blugan

Kuebler

2019

Ceramics International

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Production of improved SiC and SiCN ceramics from polycarbosilane and polysilazane composites

Cited by 3 publications

References 18 publications

Pulsed UV Laser Processing of Carbosilane and Silazane Polymers

Pulsed UV Laser Processing of Carbosilane and Silazane Polymers

Polymer‐Derived High‐Temperature Nonoxide Materials: A Review

Maskless lithography of silazanes for fabrication of ceramic micro-components

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