Production of Pulse Glow Discharge in Atmospheric Pressure Nitrogen Using Needle-Array Electrode

Takaki, Koichi; Kirihara, Hidekazu; Noda, Chiharu; Mukaigawa, Seiji; Fujiwara, Tamiya

doi:10.1143/jjap.45.8241

Cited by 9 publications

(5 citation statements)

References 15 publications

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“…If the electron and ion concentrations are reasonably low, their diffusion in the plasma can be considered to be independent of each other. 24 Because the ionization rate of a barrier discharge is very low at atmospheric pressure, we can use the Einstein equation to estimate the electron temperature 25 :…”

Section: Resultsmentioning

confidence: 99%

Electron density and temperature of gas-temperature-dependent cryoplasma jet

Noma

Choi

Muneoka

et al. 2011

Journal of Applied Physics

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A microsize cryoplasma jet was developed and analyzed at plasma gas temperatures ranging from room temperature down to 5 K. Experimental results obtained from optical emission spectroscopy and current–voltage measurements indicate that the average electron density and electron temperature of the cryoplasma jet depend on the gas temperature. In particular, the electron temperature in the cryoplasma starts to decrease rapidly near 60 K from about 13 eV at 60 K to 2 eV at 5 K, while the electron density increases from about 109 to approximately 1012 cm−3 from room temperature to 5 K. This phenomenon induces an increase in the Coulomb interaction between electrons, which can be explained by the virial equation of state.

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Section: Resultsmentioning

confidence: 99%

Electron density and temperature of gas-temperature-dependent cryoplasma jet

Noma

Choi

Muneoka

et al. 2011

Journal of Applied Physics

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“…The electron swarm parameters were estimated using BOLSIG+ [41] and the cross section database [42-44]. The above estimation method was described in more detail in [56].…”

Section: Electron Temperature and Densitymentioning

confidence: 99%

Experimental and numerical investigation of time evolution of discharge current and optical emission in helium–nitrogen cryoplasmas

Muneoka

Urabe

Choi

et al. 2014

Plasma Sources Sci. Technol.

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Cryoplasmas represent a class of non-equilibrium plasmas whose gas temperature can be controlled below room temperature. However, so far, the influence of the plasma gas temperature on the plasma chemical reactions has not yet been examined in detail. Here we investigated the time-dependent reaction dynamics related to optical emission in helium-nitrogen cryoplasmas. We acquired voltage and discharge current waveforms, optical emission spectra, and observed a temporal change of the emission intensity in helium-nitrogen cryoplasmas at two experimental conditions (temperatures of temperature detector: 5 K and plasma gas temperature: 28 K (condition A), 40 K and 54 K (condition B)). Two time-dependent phenomena were observed: the first was a longer duration of the discharge current compared to that of helium emission at both conditions A and B, and the second was nitrogen ion emission delayed by about 8 µs with respect to the emissions of atomic helium and helium dimers at 40 K. The experimental observations could be reproduced qualitatively by a global reaction model, which took into account the effect of the plasma gas temperature on the reaction rate constants and the diffusion coefficients. The simulations suggested that the reactions related to metastable helium atom were the key reactions, and that the long lifetimes of metastable helium atoms at cryogenic gas temperatures are crucial for the appearance of the time-dependent phenomena. These results imply that the plasma gas temperature is one of the key parameters in non-equilibrium plasma chemistry.

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“…14) The electrode configuration and the supplied gas are crucial factors for a stabile pulsed glow discharge because the discharge duration is less than 500 ns under a discharge current exceeding 20 A. 15) We extended the atmospheric pulsed glow discharge duration to 1 s by means of a miniature helium gas flow from the nozzle anode and plain plate cathode. 16,17) Although this setup increased the discharge duration, the low pulsed voltage caused a gap separation of less than 1.0 mm for the generation of the pulsed glow discharge.…”

Section: Introductionmentioning

confidence: 99%

Effect of DC Pre-Discharge on the Generation of Atmospheric Pulsed Microdischarges

Kikuchi

Suzuki

Muto

et al. 2012

Jpn. J. Appl. Phys.

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The effect of driving frequency in the range of 13-50 MHz on the electron energy probability function (EEPF) in capacitively coupled discharges is studied using particle-in-cell/Monte Carlo(PIC/MC) method. The EEPFs obtained from the simulation generally agree well with the measured data of Abdel-Fattah and Sugai. Detailed comparison shows, however, that the transition from the Druyvesteyn distribution to the bi-Maxiwellian type with increasing driving frequency is not as clear in the simulation as in the experiment.Capacitively coupled plasmas (CCPs) have been extensively used in material processing such as etching and sputtering. The use of very high frequency (VHF) CCPs is a recent trend. When the driving frequency increases from 13.56 MHz to VHF range (30-100 MHz), the characteristics of the plasma drastically change, e.g., plasma density increases and dc self-bias voltage decreases. Further advantages of the VHF CCPs are reported in ref. 1. Abdel-Fattah and Sugai 2) measured the effect of the driving frequency (13-50 MHz) on the electron energy probability function (EEPF) in capacitively coupled argon plasma.Wakayama and Nanbu 3) developed the one-dimensional (1D) simulation code for CCPs for arbitrary frequency. The most severe method of validating the plasma simulation code is by checking whether the EEPF obtained from experiments can be reproduced. The EEPF is one of the most important characteristics of processing plasmas because all types of rate constant are determined by the EEPF. In this work, we examine the effect of driving frequency on the EEPF and compare the simulation results with the experiment conducted at Nagoya University. 2) The 1D computational domain based on the experimental apparatus described in ref. 2 is shown in Fig. 1. In the experiment, 2) the capacitive discharge is formed between two stainless-steel electrodes with a diameter of 15 cm separated by H ¼ 6:5 cm. The lower electrode is powered by the RF-to-VHF (13.56-50 MHz) generator through a matching box, while the upper electrode is grounded. The spaces between each electrode and the chamber wall are filled with insulating material to prevent the plasma from expanding outward, and hence, make the self-bias as negligibly small as 1-2 V, thus making the discharge symmetrical.The discharge conditions are chosen to be equal to those of the experiment; the peak-to-peak voltage V pp is 80 V, the gas pressure is 100 mTorr, and the discharge gas is argon. As for eAr collisions, elastic collision, ionizing collision, and 25 exciting collisions are considered on the basis of a set of cross-section data obtained by Hayashi. 4) The collision judgment and the determination of collisional event are carried out using Nanbu's method. 5) Elastic collision and resonant charge-exchange are considered for Ar þ Ar collision using the simple and computationally efficient model. 6) Calculation is carried out for the driving frequencies of 13.56, 27, 37, 44, and 50 MHz by fixing the discharge voltage and gas pressure. Figure 2 shows the EEPFs at freque...

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Production of Pulse Glow Discharge in Atmospheric Pressure Nitrogen Using Needle-Array Electrode

Cited by 9 publications

References 15 publications

Electron density and temperature of gas-temperature-dependent cryoplasma jet

Electron density and temperature of gas-temperature-dependent cryoplasma jet

Experimental and numerical investigation of time evolution of discharge current and optical emission in helium–nitrogen cryoplasmas

Effect of DC Pre-Discharge on the Generation of Atmospheric Pulsed Microdischarges

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