1991
DOI: 10.1007/bf02402962
|View full text |Cite
|
Sign up to set email alerts
|

Production of submicron SiC particles by d.c. thermal plasma: a systematic approach based on injection parameters

Abstract: Aiming at producing high temperature structural ceramics, ultra-fine SiC powders were synthesized by the gas phase reaction of silicon tetrachloride with methane in a d.c. thermal plasma. The influence of parameters as the SiCI4 feeding rate, C/Si and H2/C molar ratios and internal pressure on the powder properties were investigated. The SiC powders were characterized by chemical analysis, Fourier transform infrared spectroscopy, X-ray diffraction and scanning electronic microscopy. The experimental set-up all… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
5
0

Year Published

1991
1991
2021
2021

Publication Types

Select...
5
1

Relationship

1
5

Authors

Journals

citations
Cited by 17 publications
(5 citation statements)
references
References 8 publications
0
5
0
Order By: Relevance
“…But, SiC nanoparticles also exhibit properties different from the bulk material and allow the creation of composite materials with new properties. Thus, their production has been studied by different methods such as the thermal pyrolysis of organic precursors [ 3 5 ], or plasma synthesis by means of DC thermal [ 6 ], inductive [ 7 8 ] or low-pressure microwave plasmas [ 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…But, SiC nanoparticles also exhibit properties different from the bulk material and allow the creation of composite materials with new properties. Thus, their production has been studied by different methods such as the thermal pyrolysis of organic precursors [ 3 5 ], or plasma synthesis by means of DC thermal [ 6 ], inductive [ 7 8 ] or low-pressure microwave plasmas [ 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…Unlike the production of silicon carbide, where the H2/C molar ratio is critical to the powder production [27], the Hz/N molar ratio does not seem to exert the same type of effect on the silicon nitride powder production, as shown in Fig. 2.…”
Section: Optimization Of the Process Parametersmentioning
confidence: 69%
“…The apparatus used is described elsewhere [27], all reagents At, NH3, H2 and SIC14 (Aldrich Chem. Co., 99% pure) were used without further purification.…”
Section: Methodsmentioning
confidence: 99%
“…The production of SiC nanoparticles using different processes, including plasmas, has been demonstrated in previous studies [6][7][8][9][10][11][12][13][14]47]. In thermal plasmas, the synthesis route is rather understood, e.g.…”
Section: Discussionmentioning
confidence: 99%
“…Plasma-based processes have high potential in nanomaterial synthesis. SiC nanoparticles were successfully synthesized in various plasma sources, such as DC thermal arc [11], inductive RF [12] or microwave plasmas at low-pressure [13] and at atmospheric pressure [14]. In DC thermal arc plasma, SiC particles of ~100 nm diameter were synthesized by the gas phase reaction of silicon tetrachloride with methane.…”
Section: Introductionmentioning
confidence: 99%