2015
DOI: 10.1109/tsm.2015.2439951
|View full text |Cite
|
Sign up to set email alerts
|

Production Planning and WIP Assignment for Wafer Fabrication Tools With Availability Constraints

Abstract: This paper deals with a short-term production plan of a single toolset during a shift at a semiconductor fabrication plant. We propose a cost-based optimization model that seeks to minimize the cost of the shift while meeting the following conditions: 1) the shift produces its required output, measured in work-in-process (WIP) levels; 2) preventive maintenance (PM) tasks are carried out in compliance with the manufacturer's recommended PM policy; and 3) the equipment undergoes cleaning operations, as recommend… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
1
0

Year Published

2015
2015
2022
2022

Publication Types

Select...
4
2

Relationship

0
6

Authors

Journals

citations
Cited by 6 publications
(1 citation statement)
references
References 16 publications
0
1
0
Order By: Relevance
“…Hajba and Horvá th (2014) constructed mixed integer linear programming (MILP) models to optimize the real production systems without considering the product departure halfway. Perlman et al (2015) proposed a cost-based optimization model that seeks to minimize the cost. However, most of the previous mathematical models consider that the production systems have infinite buffer capacities so that products' queue time and queue length are not explicitly addressed (Dhouib et al, 2009).…”
mentioning
confidence: 99%
“…Hajba and Horvá th (2014) constructed mixed integer linear programming (MILP) models to optimize the real production systems without considering the product departure halfway. Perlman et al (2015) proposed a cost-based optimization model that seeks to minimize the cost. However, most of the previous mathematical models consider that the production systems have infinite buffer capacities so that products' queue time and queue length are not explicitly addressed (Dhouib et al, 2009).…”
mentioning
confidence: 99%