39th ARFTG Conference Digest 1992
DOI: 10.1109/arftg.1992.326968
|View full text |Cite
|
Sign up to set email alerts
|

Production Worthiness of a GaAs Wafer FAB as Demonstrated Through Automated RF Probe Measurements

Abstract: A novel technique has been developed that utilizes the automated RF probe operation as a means to statistically verify and demonstrate the uniformity of a 0.5um ion-implanted MESFET wafer fab at Texas Instruments. Over seventythousand MMlCs have been characterized in a 6 month span to provide a healthy statistical database. Analysis of the database shows both the GaAs process and automated measurement technology to be robust and yield uniform device performance. Therefore, verifying that RF probe technique gen… Show more

Help me understand this report

This publication either has no citations yet, or we are still processing them

Set email alert for when this publication receives citations?

See others like this or search for similar articles