Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy

Garnæs, Jørgen; Hansen, Poul Erik; Agersnap, N.; Holm, Jesper; Borsetto, Francesca; Kühle, A.

doi:10.1364/ao.45.003201

Cited by 42 publications

(26 citation statements)

References 12 publications

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“…After the image acquisition, SPIP (IBM, Denmark) was used to evaluate the images which work on the specific algorithm (Garnaes et al, 2006). The length and diameter of different blood vessels were measured through the calibration and measurement command.…”

Section: Image Acquision and Quantification Using Spip Softwarementioning

confidence: 99%

Evaluation of pharmacological effect of Teucrium stocksianum extract on angiogenesis using chorioallantoic membrane assay

Tabassum

Alamgeer

Aziz

et al. 2016

Bangladesh J Pharmacol

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The present study was aimed to evaluate the effect of Teucrium stocksianum on angiogenesis by using chorioallantoic membrane (CAM) assay. Fertilized eggs were incubated on the 5th day and dose of different dilutions 0.03%, 0.05%, 0.1%, and 0.5% of the plant extract was applied on 6th day. Evaluation of primary, secondary and tertiary blood vessels diameter and CAM area on 7th day by SPIP software. T. stocksianum showed antiangiogenic effect by reducing the diameter of CAM of blood vessels by applying the dilutions while significant results were obtained at dilution of 0.5%.

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Section: Image Acquision and Quantification Using Spip Softwarementioning

confidence: 99%

Evaluation of pharmacological effect of Teucrium stocksianum extract on angiogenesis using chorioallantoic membrane assay

Tabassum

Alamgeer

Aziz

et al. 2016

Bangladesh J Pharmacol

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show abstract

“…The design process and industrial use of functional materials require rapid and non-destructive techniques of characterisation of the embedded micro and nano structures. Among several physically distinct methods, we focus on the combined spectroscopic and angular resolved scatterometry technique called Optical Diffraction Microscopy (ODM) [1,2,5,6,7]. Here, specific features of the sample under investigation are reconstructed from the measured optical power in the scattered far field.…”

Section: Characterisation Of Micro and Nano Structures Embedded In Mamentioning

confidence: 99%

Application of the Method of Auxiliary Sources in Optical Diffraction Microscopy

Karamehmedović

Sørensen

Hansen

et al. 2010

Progress in Industrial Mathematics at ECMI 2008

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“…However, the steep sidewalls and footing regions of structures can not be resolved, since the tip can not come in close proximity to the surface in these regions. Tilting the AFM tip with respect to the sample is a solution to make steep sidewalls measurable [1]. However, since different sidewalls can only be measured at different views with different tilting angles, the measured images obtained at different views must be stitched together to get the complete structure form.…”

Section: Introductionmentioning

confidence: 99%

New developments at PTB in 3D-AFM with tapping and torsion AFM mode and vector approach probing strategy

et al. 2011

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A new 3D-AFM for true 3D measurements of nano structures has been developed at Physikalisch TechnischeBundesanstalt, the national metrology institute of Germany. In its configuration, two piezo actuators are applied to drive the AFM cantilever near its vertical and torsional resonant frequencies. In such a way, the AFM tip can probe the surface with a vertical and/or a lateral oscillation, offering high 3D probing sensitivity. For enhancing measurement flexibility as well as reducing tip wear, a so called "vector approach probing" (VAP) method has been applied. The sample is measured point by point using this method. At each probing point, the tip is approached towards the surface in its normal direction until the desired tip-sample interaction is detected and then immediately withdrawn from the surface. Preliminary experimental results show promising performance of the developed system. The measurement of a line structure of 800 nm height employing a super sharp AFM tip is performed, showing a repeatability of its 3D profiles of better than 1 nm (p-v). A single crystal critical dimension reference material (SCCDRM) having features with almost vertical sidewall is measured using a flared AFM tip. Results show that the feature has averaged left and right sidewall angles of 88.64° and 88.67°, respectively. However, the feature width non-uniformity may reach 10 nm within the measurement range of 1 μm. The standard deviation of the averaged middle CD values of 7 repeated measurements reaches 0.35 nm. In addition, an investigation of long term measurement stability is performed on a PTB photomask. The results shows that the 3D-AFM has a drift rate of about 0.00033 nm per line, which confirms the high measurement stability and the very low tip wear.

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Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy

Cited by 42 publications

References 12 publications

Evaluation of pharmacological effect of <i>Teucrium stocksianum</i> extract on angiogenesis using chorioallantoic membrane assay

Evaluation of pharmacological effect of <i>Teucrium stocksianum</i> extract on angiogenesis using chorioallantoic membrane assay

Application of the Method of Auxiliary Sources in Optical Diffraction Microscopy

New developments at PTB in 3D-AFM with tapping and torsion AFM mode and vector approach probing strategy

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