Profiling of patterned metal layers by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS)

A local aerosol extraction strategy for the determination of the aerosol composition in laser ablation inductively coupled plasma mass spectrometry

“…[1][2][3][4][5] The sample is commonly placed in an ablation cell through which a carrier gas is flushed to transport the generated aerosol to the ICP-MS. A wide variety of ablation cells have been designed for coupling of laser ablation to ICP-OES/MS. [6][7][8][9][10][11][12][13][14][15][16][17][18][19] Moenke-Blankenburg 9 reviewed the evolution of laser ablation cell designs, showing that there are advantages and disadvantages with both open and closed cell designs. Open cell designs are independent of the sample size and are directly placed on a planar sample surface, which permits minimization of the dead volume.…”

Laser Ablation Inductively Coupled Plasma Mass Spectrometry (LA‐ICPMS)

“…In general, using a laser pulse repetition rate that ensures the occurrence of the aerosol in the ICP only after the previous cloud has diminished would reduce this effect but lead to exceedingly long analysis times when large samples need to be analyzed. Most applications therefore are carried out by using higher laser frequencies (typically between 5 and 10 Hz) and operate at low to moderate translation speed (between 5 and 50 μm s −1 ) of the sample under the laser beam [102,103]. This leads to greater overlap of the individual laser shots and deeper grooves.…”

Application of laser ablation-ICP-mass spectrometry for 2-dimensional mapping of element distributions in a Late Archean impact spherule layer

“…[10][11][12][13][14][15] The use of LA-ICP-MS as a surface analytical technique for the determination of lateral element distribution has also been described for ceramic layers, 16 alloys 17 and for proling of metal layers. 18 Recently, the basic principles of and recent developments in LA-ICP-MS as a method for trace element analysis of solid materials have been reviewed by Koch and Gunther. 19 Among a wide variety of analytical techniques for surface analysis, secondary ion mass spectrometry (SIMS) 20 and sputtered neutral mass spectrometry (SNMS) 21 have been used extensively for the determination of lateral element distribution on cross-section surfaces.…”