2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &Amp; Eurosensors XXXIII (TRANSDUCERS &Am 2019
DOI: 10.1109/transducers.2019.8808800
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Programmable Micro-Object Assembly with Transfer

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Cited by 4 publications
(6 citation statements)
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“…[63] The second driving force is toward developing high-resolution Micro-LED display, for which millions of Micro-LEDs must be assembled onto a driving backplane. In the latter case, a variety of Micro-LED transfer techniques have been developed, including polydimethylsiloxane (PDMS) stamp transfer, [5,27,118,119] electrostatic transfer, [120] fluid assembly, [121,122] laser-based transfer, [46,[48][49][50] magnet-assisted transfer, [123] roll-to-roll, [121] tape transfer, [124,125] Figure 9. a) Schematic drawing of the LLO process used for releasing the temporary glass carrier.…”
Section: Chip Mass Transfermentioning
confidence: 99%
“…[63] The second driving force is toward developing high-resolution Micro-LED display, for which millions of Micro-LEDs must be assembled onto a driving backplane. In the latter case, a variety of Micro-LED transfer techniques have been developed, including polydimethylsiloxane (PDMS) stamp transfer, [5,27,118,119] electrostatic transfer, [120] fluid assembly, [121,122] laser-based transfer, [46,[48][49][50] magnet-assisted transfer, [123] roll-to-roll, [121] tape transfer, [124,125] Figure 9. a) Schematic drawing of the LLO process used for releasing the temporary glass carrier.…”
Section: Chip Mass Transfermentioning
confidence: 99%
“…Electrostatic assembly exploits the adhesive force induced by an external electric field across a set of conductive electrodes to manipulate microcomponents [ 281 , 282 , 283 , 284 , 285 , 286 , 287 , 288 , 289 ]. In other words, charged microcomponents can be trapped by patterned surface areas with localized electrical fields.…”
Section: Chip-scale Transfer Techniquesmentioning
confidence: 99%
“…Several investigations into electrostatic field force have mainly been focused on manipulation of microparticles [ 284 ]. However, this concept was also explored for macroscale wafer handling [ 283 ] and microscale device assembly [ 281 , 283 , 286 , 287 , 288 , 289 ].…”
Section: Chip-scale Transfer Techniquesmentioning
confidence: 99%
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