2023
DOI: 10.3390/cryst13071004
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Progress in Ammonothermal Crystal Growth of Gallium Nitride from 2017–2023: Process, Defects and Devices

Abstract: Gallium nitride continues to be a material of intense interest for the ongoing advancement of electronic and optoelectronic devices. While the bulk of today’s markets for low-performance devices is still met with silicon and blue/UV LEDs derived from metal–organic chemical vapor deposition gallium nitride grown on foreign substrates such as sapphire and silicon carbide, the best performance values consistently come from devices built on bulk-grown gallium nitride from native seeds. The most prominent and promi… Show more

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Cited by 8 publications
(16 citation statements)
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“…Despite issues such as low growth rates and demanding equipment requirements, the quality and size of crystals in both basic and acidic ammonia thermal growth systems have seen significant improvements. The crystal quality grown by basic mineralizers is more stable, while acidic mineralizers have a relative advantage in terms of growth rate [31] . When compared to HVPE growth technology, the ammonothermal growth technique exhibits a lower dislocation density and absence of lattice warping.…”
Section: Challenges and Prospectsmentioning
confidence: 99%
See 1 more Smart Citation
“…Despite issues such as low growth rates and demanding equipment requirements, the quality and size of crystals in both basic and acidic ammonia thermal growth systems have seen significant improvements. The crystal quality grown by basic mineralizers is more stable, while acidic mineralizers have a relative advantage in terms of growth rate [31] . When compared to HVPE growth technology, the ammonothermal growth technique exhibits a lower dislocation density and absence of lattice warping.…”
Section: Challenges and Prospectsmentioning
confidence: 99%
“…This paper provides a comprehensive review of research advances in liquid phase growth of gallium nitride. It is compared with previous review articles on GaN growth by the liquid phase method [30,31] . The second part describes not only the development of Na fluxes, but also summarizes GaN crystal growth using other metal fluxes such as K, Li, Ca, etc.…”
Section: Introductionmentioning
confidence: 99%
“…The growth of GaN by the ammonothermal method has been the subject of intense research for nearly three decades and is well summarized in recent reviews. 19,24,26 The typical ammonothermal process set up is illustrated in Figure 2. 27 Some of the key takeaways from the accumulated literature are that (a) linear crystal growth rates are relatively slow, with top reported values of around 100-200 µm/day for ammonobasic 28 and up to 700 µm /day for ammonoacidic growth, 29 (b) dislocation densities can be quite low, down as far as 100 defects/cm 2 , 30 (c) oxygen is the key impurity, 19 (d) simultaneous growth in different crystal planes can be destabilizing, 31 and (e) very long growth times are a significant drag on the speed of process innovation.…”
Section: Ammonothermal Nitridesmentioning
confidence: 99%
“…The ammonothermal (AT) method is one of the key technologies used for growing bulk GaN crystals. It uses supercritical ammonia for the dissolution of feedstock material in order to crystallize bulk GaN on native seeds due to a convection-driven transport [ 4 , 5 ]. The method enables the production of GaN substrates with various conductivity, including n -type, p -type, as well as semi-insulating (SI) material with a resistivity between 10 6 and 10 12 Ωcm.…”
Section: Introductionmentioning
confidence: 99%