2018
DOI: 10.1049/iet-pel.2017.0499
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Progress in IGBT development

Abstract: Recent progress in insulated gate bipolar transistor (IGBT) development is reviewed. Highlighted issues range from technological aspects such as special processes suitable for thin-wafer-processing, through the advanced cell and vertical concepts to approaches for improved IGBT ruggedness. Latest advancements regarding thermal management in both modules and discrete chips are also addressed. (a) Turn-off transients of a 15 A-1200 V-IGBT with an FS layer created by a threestage proton implantation (T = 125°C), … Show more

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Cited by 19 publications
(7 citation statements)
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“…Considering movements to larger diameter wafers for power devices, it is obvious that TWP is one of the key technologies. Thereby, the details of TWP, especially about methods to fabricate N-buffer layers, have not been disclosed and still under-covered [18][19][20]. TWP contributes to significant improvements in the performances of IGBT and diode.…”
Section: Improving Fundamental Trade-offmentioning
confidence: 99%
“…Considering movements to larger diameter wafers for power devices, it is obvious that TWP is one of the key technologies. Thereby, the details of TWP, especially about methods to fabricate N-buffer layers, have not been disclosed and still under-covered [18][19][20]. TWP contributes to significant improvements in the performances of IGBT and diode.…”
Section: Improving Fundamental Trade-offmentioning
confidence: 99%
“…With the development of high-power devices, such as insulated gate bipolar transistors (IGBTs), toward miniaturization, high-current density, and high-tension, a highly efficient approach for heat dissipation in time has become very urgent, which has a detrimental effect on the performance and lifetime of these devices. Generally, there are three typical methods for heat dissipation, i.e., thermal conduction, convection, and radiation. , Traditional radiator fans and cooling fins have been widely used to enhance heat convection and thermal conduction, respectively. However, given the increasing demand on higher-power devices, these methods are insufficient for heat dissipation, resulting in power-off protection and thus decreasing the operating efficiency.…”
Section: Introductionmentioning
confidence: 99%
“…It is important to clarify the effect of the oxygen suppression in wafers on wafer strength, particularly in power devices because they use wafers with extremely low oxygen concentrations. [24][25][26] Various studies have been conducted on the changes in wafer strength due to the differences in the oxygen concentration, particularly from a microscopic perspective, such as the changes in strength due to dislocation, elongation, and precipitate formation. [27][28][29] Therefore, it is useful to confirm the oxygen dependence of defect formation and the strength change caused by ion implantation.…”
Section: Introductionmentioning
confidence: 99%