“…Silicon carbide (SiC) is currently attracting great interest due to the superior properties like wide energy bandgap, high thermal conductivity, high electron drift velocity, and excellent chemical and physical stability. , In applications, defects in SiC play a significant role, such as color centers in quantum applications, , Si-vacancy-related ferromagnetism in spintronic devices, and temperature monitors associated with defect recovery . It is well known that ion irradiation is widely used to introduce defects in materials in a controllable way. ,, Therefore, it could be foreseen that desired defects can be produced as expected by energetic ion irradiation if the defect generation rate is accurately known.…”