“…H ydrogenated microcrystalline silicon (µc-Si:H), or nanocrystalline silicon (nc-Si:H), is a composite material, consisting of nanosized silicon crystallites surrounded by an amorphous tissue, with optical properties similar to those of crystalline silicon (c-Si). [1][2][3][4][5][6][7][8] In most cases, µc-Si:H is grown by plasma-enhanced chemical vapor deposition (PECVD) 1,[4][5][6][7] or hot-wire CVD, 8) similarly to hydrogenated amorphous silicon (a-Si:H). Compared with a-Si:H, µc-Si:H has several advantages such as a high carrier mobility and a wide spectral response (up to 1.1 eV), and thus µc-Si:H is attractive for various opt-electronic applications including thin-film transistors, [9][10][11] solar cells, [2][3][4][5]7,8,12) and optical sensors.…”