2023
DOI: 10.15541/jim20230037
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Progress of High Strength and High Thermal Conductivity Si3N4 Ceramics for Power Module Packaging

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Cited by 4 publications
(1 citation statement)
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“…Serving as a pivotal ceramic structural material, Si 3 N 4 finds extensive application in semiconductor, metallurgy, aerospace, machinery, photovoltaic, medical, and fine grinding industries because of its excellent chemical stability, heat and wear resistance, good insulation performance, high strength, and good thermal shock resistance. [1][2][3][4][5][6][7][8] Si 3 N 4 powder is one of the crucial raw materials of Si 3 N 4 ceramics. It primarily exists in two forms, α-Si 3 N 4 and β-Si 3 N 4 .…”
Section: Introductionmentioning
confidence: 99%
“…Serving as a pivotal ceramic structural material, Si 3 N 4 finds extensive application in semiconductor, metallurgy, aerospace, machinery, photovoltaic, medical, and fine grinding industries because of its excellent chemical stability, heat and wear resistance, good insulation performance, high strength, and good thermal shock resistance. [1][2][3][4][5][6][7][8] Si 3 N 4 powder is one of the crucial raw materials of Si 3 N 4 ceramics. It primarily exists in two forms, α-Si 3 N 4 and β-Si 3 N 4 .…”
Section: Introductionmentioning
confidence: 99%