Precise monolayer epitaxy is important
for two-dimensional
(2D)
semiconductors toward future electronics. Here, we report a new self-limited
epitaxy approach, liquid phase edge epitaxy (LPEE), for precise-monolayer
epitaxy of transition-metal dichalcogenides. In this method, the liquid
solution contacts 2D grains only at the edges, which confines the
epitaxy only at the grain edges and then precise monolayer epitaxy
can be achieved. High-temperature in situ imaging of the epitaxy progress
directly supports this edge-contact epitaxy mechanism. Typical transition-metal
dichalcogenide monolayers (MX2, M = Mo, W, and Re; X =
S or Se) have been obtained by LPEE with a proper choice of molten
alkali halide solvents (AL, A = Li, Na, K, and Cs; L = Cl, Br, or
I). Furthermore, alloying and magnetic-element doping have also been
realized by taking advantage of the liquid phase epitaxy approach.
This LPEE method provides a precise and highly versatile approach
for 2D monolayer epitaxy and can revolutionize the growth of 2D materials
toward electronic applications.