2006
DOI: 10.1063/1.2170067
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Progress toward a thousandfold reduction in 1∕f noise in magnetic sensors using an ac microelectromechanical system flux concentrator (invited)

Abstract: The potential advantage of some magnetic sensors having a large response is greatly decreased because of the 1 / f noise. We are developing a device, the microelectromechanical system ͑MEMS͒ flux concentrator, that will mitigate the effect of this 1 / f noise. It does this by placing flux concentrators on MEMS structures that oscillate at kilohertz frequencies. By shifting the operating frequency, the 1 / f noise will be reduced by one to three orders of magnitude depending upon the sensor and the desired oper… Show more

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Cited by 99 publications
(65 citation statements)
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“…Attempts to improve field detectivity at low frequencies include low temperature annealing [14,15] and using flux concentrators to amplify the magnetic field at the sensor [5,6,16,17]. An interesting suggestion is to use an ac microelectromechanical flux concentrator system to mitigate the nuisance of 1/f noise by modulating the sensor magnetic field to a higher frequency regime where the 1/f noise is lower [18].…”
Section: Introductionmentioning
confidence: 99%
“…Attempts to improve field detectivity at low frequencies include low temperature annealing [14,15] and using flux concentrators to amplify the magnetic field at the sensor [5,6,16,17]. An interesting suggestion is to use an ac microelectromechanical flux concentrator system to mitigate the nuisance of 1/f noise by modulating the sensor magnetic field to a higher frequency regime where the 1/f noise is lower [18].…”
Section: Introductionmentioning
confidence: 99%
“…2,3 In small sensors, such as magnetoresistive sensors, this is done by using movable flux concentrators on microelectromechanical systems (MEMS) structures to modulate the magnetic field at the position of the sensor. The field modulation increases the operating frequency of the sensor to tens of kHz.…”
Section: Introductionmentioning
confidence: 99%
“…4,5 Because of the need for moving a larger mass flux concentrator it is very difficult to use these to modulate the magnetic field of centimeter sized sensors. Modulation frequencies of 100 Hz were achieved using flux concentrators on a rotating disk, but unfortunately acoustic vibrations increased the background noise.…”
mentioning
confidence: 99%