1998
DOI: 10.1117/12.328065
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Progress toward an uncooled IR imager with 5-mK NETD

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Cited by 36 publications
(19 citation statements)
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“…Increased g th in short L Cth region makes large NETD TM . The lower NETD TF of the proposed design is due to its increased absorber area [6]. The simulation results indicate that the proposed structure has improved noise characteristics.…”
Section: Experiments and Resultsmentioning
confidence: 70%
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“…Increased g th in short L Cth region makes large NETD TM . The lower NETD TF of the proposed design is due to its increased absorber area [6]. The simulation results indicate that the proposed structure has improved noise characteristics.…”
Section: Experiments and Resultsmentioning
confidence: 70%
“…Our approach for TM-noise reduction is to increase both k which is proportional to 1/L 3 and A by halving the leg length (L) in the given pixel area. Although the sensitivity [temperature coefficient of capacitance (TCC)] of the device is decreased since Δz/ΔT d is proportional to L 2 [6], the overall TM-noise can be reduced. The top view of a conventional cantilever-type IR detector is shown in Fig.1(a) [2].…”
Section: Experiments and Resultsmentioning
confidence: 99%
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“…And along with the scientific and technological progress, the MEMS based Focal Plane Array (FPA) infrared imaging system is drawing increasing attention, which is uncooled, cheap and more reliable than traditional systems [1][2] . According to its readout methods, there are basically two kinds of FPA infrared imaging system: electrical readout system and optical readout system.…”
Section: Introductionmentioning
confidence: 99%
“…Micro-cantileverbased IRFPA is one of the most promising IR sensing methods which have the potential to overcome the limitations of the present un-cooled sensor technology and achieve superior performance. It is very suitable for commercial applications as well as military applications [1][2][3][4][5][6][7][8] .…”
Section: Introductionmentioning
confidence: 99%