Abstract:In this paper, the main characteristics and steps for design and simulation of a thermal mass flow microsensor of calorimetric type are described, aiming to measure flow rate and fluid velocity. The device was designed computationally and its applicability evaluated based on the simulation data. The results leaded to conclude that flows speed between 0 and 14 m/s can be measured using the proposed sensor. Resumo: Neste trabalho são descritas as principais características e etapas de projeto e simulação de um m… Show more
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