Advances in CMP Polishing Technologies 2012
DOI: 10.1016/b978-1-4377-7859-5.00005-3
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Promising Future Processing Technology

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“…For this purpose, we followed the theories laid down by mechanical engineering and processing technology, where the surfaces are represented as a composition of different sinusoidal waves. The high frequency waves are defining the roughness, medium frequencies are the waviness, and low frequencies consist of the form of the given surface ( Figure 7) [28][29][30][31]. The suitable decomposition of the surface profile was performed along transects, using the International Organization for Standardization (ISO) 16610-21 closed profile Gaussian filter.…”
Section: Applied Stereo Computer Vision Techniques For Estimation Thementioning
confidence: 99%
“…For this purpose, we followed the theories laid down by mechanical engineering and processing technology, where the surfaces are represented as a composition of different sinusoidal waves. The high frequency waves are defining the roughness, medium frequencies are the waviness, and low frequencies consist of the form of the given surface ( Figure 7) [28][29][30][31]. The suitable decomposition of the surface profile was performed along transects, using the International Organization for Standardization (ISO) 16610-21 closed profile Gaussian filter.…”
Section: Applied Stereo Computer Vision Techniques For Estimation Thementioning
confidence: 99%