Propagation and Imaging of Mechanical Waves in a Highly Stressed Single-Mode Acoustic Waveguide

Romero, Erick; Kalra, Rachpon; Mauranyapin, Nicolas P.; Baker, Christopher G.; Chunxia, Meng; Bowen, Warwick P.

doi:10.1103/physrevapplied.11.064035

Cited by 21 publications

(27 citation statements)

References 27 publications

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“…The non-uniform residual stress σ r of hetero-epitaxially grown 3C-SiC [23] allows us to investigate the dependence of the mean stress on film thickness σ(h). To find the relation σ(h), we measure the fundamental resonance frequency ω m of each fabricated trampoline from its noise power spectral density with an optical heterodyne detection system operating in vacuum (P ∼ 10 −6 mbar) as reported previously [30,34]. The quality factor Q is determined via a ringdown measurement after applying an impulse to the trampoline as shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

Engineering the Dissipation of Crystalline Micromechanical Resonators

et al. 2020

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High quality micro-and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are particularly attractive for such resonators due to their prospects for high quality, intrinsic stress and yield strength, and low dissipation. However, when grown on a silicon substrate, interfacial defects arising from lattice mismatch with the substrate have been postulated to introduce additional dissipation. Here, we develop a new backside etching process for single crystal silicon carbide microresonators that allows us to quantitatively verify this prediction. By engineering the geometry of the resonators and removing the defective interfacial layer, we achieve quality factors exceeding a million in silicon carbide trampoline resonators at room temperature, a factor of five higher than without the removal of the interfacial defect layer. We predict that similar devices fabricated from ultrahigh purity silicon carbide and leveraging its high yield strength, could enable room temperature quality factors as high as 6 × 10 9 .

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Section: Resultsmentioning

confidence: 99%

Engineering the Dissipation of Crystalline Micromechanical Resonators

et al. 2020

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“…Generating a large phonon flux requires impractically large optical power because of this difference in energy scales [27]. Capacitive transducers [28,29] and piezoelectric transducers convert microwave photons to phonons of the same frequency and thus near unity power efficiency conversion can be realized.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Transduction of a Wavelength-Scale Mechanical Waveguide

et al. 2020

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We present a piezoelectric transducer in thin-film lithium niobate that converts a 1.7 GHz microwave signal to a mechanical wave in a single mode of a 1 micron-wide waveguide. We measure a -12 dB conversion efficiency that is limited by material loss. The design method we employ is widely applicable to the transduction of wavelength-scale structures used in emerging phononic circuits like those at the heart of many optomechanical microwave-to-optical converters.

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“…[ 2 ] Nano‐electromechanical systems are an ideal platform for integrated phononic circuits, because very‐high‐frequency (VHF) elastic waves can be electrically generated, manipulated, and detected on a single chip. [ 3 ] Various elements including low‐loss waveguides [ 4,5 ] and high‐quality resonators [ 6 ] have been experimentally demonstrated. However, suppression of undesired backscattering of elastic waves has been considered as a grand challenge in nano‐electromechanical systems.…”

Section: Figurementioning

confidence: 99%

Experimental Demonstration of Dual‐Band Nano‐Electromechanical Valley‐Hall Topological Metamaterials

Sun

2021

Advanced Materials

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Suppression of undesired backscattering of very‐high‐frequency elastic signals has been considered as a grand challenge in integrated phononic circuits. Originating from condensed‐matter physics, valley‐Hall topological insulators provide an intriguing strategy to overcome this challenge. To date, phononic valley‐Hall topological insulators have been demonstrated only in bulk acoustic and mechanical systems operating at relatively low frequencies. Here, an integrated nano‐electromechanical valley‐Hall topological insulator operating in the very‐high‐frequency regime is experimentally realized. Valley kink states that are backscattering‐immune against sharp bends and exhibit the “valley‐momentum locking” effect simultaneously in the fundamental (≈60 MHz) and second‐order (≈120 MHz) frequency bands are demonstrated. It is further shown that the propagation directions of these dual‐band valley kink states are always locked to their valley pseudospins. The results not only enable various applications in very‐high‐frequency integrated phononic circuits with enhanced robustness and capacity, but also open the door to experimental exploration of mechanical nonlinearities, particularly those involving the fundamental and second‐order frequencies, in topologically nontrivial nanostructures.

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Propagation and Imaging of Mechanical Waves in a Highly Stressed Single-Mode Acoustic Waveguide

Cited by 21 publications

References 27 publications

Engineering the Dissipation of Crystalline Micromechanical Resonators

Engineering the Dissipation of Crystalline Micromechanical Resonators

Piezoelectric Transduction of a Wavelength-Scale Mechanical Waveguide

Experimental Demonstration of Dual‐Band Nano‐Electromechanical Valley‐Hall Topological Metamaterials

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