Properties of alumina films prepared by atmospheric pressure metal-organic chemical vapour deposition

Haanappel, V.A.C.; Corbach, H.D. van; Fransen, Τ.; Gellings, P.J.

doi:10.1016/0257-8972(94)90091-4

Cited by 29 publications

(23 citation statements)

References 17 publications

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“…7 shows the AES depth profile of the sample with a thickness of about 0.6 gm; the peak-to-peak height is shown as a function of the sputter depth. This corresponds well with earlier experiments [ 15,16] which showed that alumina films deposited in a nitrogen atmosphere also did not contain any carbon. FTIR was used to identify functional groups such as H-O and A1-O groups.…”

Section: Resultssupporting

confidence: 79%

“…The refractive indices were measured with a Plasmos ellipsometer and are shown in refractive index is given as a function of the water concentration, and changes from 1.56 to 1.63 when the water concentration changed from 0 to 0,017kPa, which corresponds well with the value for amorphous alumina [ 15 ].…”

Section: Resultsmentioning

confidence: 99%

“…8(a) and 8(b) the infrared absorption spectra are shown of the alumina films deposited at 280 and 330 °C with different water concentrations in the gas phase. The broad absorption bands at 500-1100 cm-1 represent the vibration ofA120 3 I-8, [14][15][16], and the absorption bands at 1050-1100 and 3200-3400 cm -1 the C-O and H-O bond vibrations, respectively. The vibration characteristics of H-O lie between 1250 and 2000 cm -1 and between 400 and 700 cm -~.…”

Section: Resultsmentioning

confidence: 99%

“…Problems arise if the alumina contains fast diffusion paths such as pores and cracks, as shown previously [13][14][15][16], where pore-and crack-free alumina films were not obtained. The underlying metallic substrate can then easily react with the aggressive compounds, forming corrosion products.…”

Section: Atsb + 3h20 -•T-+ai(oh)3mentioning

confidence: 99%

“…Previous papers [13][14][15][16][17] reported that alumina films suffer from internal stresses, due to thermal and growth stresses, which result in cracking and/or delamination of the alumina film. Therefore, more research is necessary to produce films with reduced stresses.…”

Section: Introductionmentioning

confidence: 99%

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Properties of alumina films prepared by metal-organic chemical vapour deposition at atmospheric pressure in the presence of small amounts of water

Haanappel

Rem

Corbach

et al. 1995

Surface and Coatings Technology

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Thin alumina films were deposited on stainless steel, type AISI 304. The deposition process was carried out in nitrogen with low partial pressures of water (0-2.6 x 10 -2 kPa (0-0.20 mmHg)) by metal-organic chemical vapour deposition (MOCVD) with aluminium-tri-sec-butoxide (ATSB) as the precursor. Also results are presented regarding the alumina deposition in the presence of small amounts of 2-butanol. The film properties, including the protection of the underlying substrate against aggressive gas compounds such as sulphur at high temperatures, the chemical composition, the microstructure, and the refractive index were investigated as a function of the water vapour pressure.In contrast with the results of stress reduction in silica films by the addition of small amounts of water to the deposition process, no significant effect on the internal stress in alumina films was found. TEM analysis showed that extremely fine grains of ~-A1203/A10(OH) were formed, in agreement with the refractive index. Only an increase of the OH groups was found if water was added to the process, which also was the only impurity in the oxide film. Carbon was not detected.

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Section: Resultssupporting

confidence: 79%

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Atsb + 3h20 -•T-+ai(oh)3mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Properties of alumina films prepared by metal-organic chemical vapour deposition at atmospheric pressure in the presence of small amounts of water

Haanappel

Rem

Corbach

et al. 1995

Surface and Coatings Technology

Self Cite

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Probing Catalytic Solid-Liquid Interfaces by Attenuated Total Reflection Infrared Spectroscopy: Adsorption of Carboxylic Acids on Alumina and Titania

Ferri

Bürgi

Baiker

2002

HCA

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Dedicated to Professor Dieter Seebach on the occasion of his 65th birthdayThe adsorption of carboxylic acids (formic, acetic, and pyruvic acid) from corresponding solutions in CH 2 Cl 2 solvent on Al 2 O 3 and TiO 2 thin films has been studied by attenuated total reflection infrared spectroscopy. The metal-oxide films were vapor-deposited on a Ge internal reflection element, which was mounted into a specially designed flow cell. The system allowed in situ monitoring of the processes occurring at the solid-liquid interface. The metal-oxide films were characterized by X-ray photoelectron spectroscopy, ellipsometry, and atomic force microscopy. Formic acid and acetic acid adsorbed predominantly as bridging species on alumina surfaces. Adsorbed free acids were not observed under a flow of neat solvent. Based on the position of the n AS (COO) and of the keto-group stretching vibration of the pyruvate ion, pyruvic acid is proposed to coordinate to the Al 2 O 3 surface in a monodentate fashion, whereas, on TiO 2 , a bidentate species is preferred. Comparison of the adsorption behavior on the vapor-deposited alumina film and on an a-Al 2 O 3 layer deposited from a water suspension of the corresponding metal-oxide powder indicated that pyruvic acid adsorbs in a similar mode, irrespective of the metal-oxide deposition technique.Introduction. ± Solid-liquid interfaces play fundamental roles in nature and technology. Many processes crucial for life occur at such interfaces and technical applications range from corrosion, tribology, electrochemistry over environmental chemistry to heterogeneous catalysis. Our knowledge of such important processes relies on techniques that probe the respective interfaces. The growing awareness that an interface may be quite different under working conditions than under conditions far away from these, has fostered the development of in situ methods. In the field of heterogeneous catalysis, important insight can be gained by monitoring the respective catalytic interface at work.Vibrational spectroscopy is ideally suited to probe interfaces [1] [2]. A vibrational spectrum contains detailed structural information of the adsorbate layer such as interaction mode between surface and adsorbate, orientation of the adsorbate and intermolecular interactions within the adsorbate layer. Furthermore, infrared radiation is noninvasive. The advances in vibrational spectroscopy of interfaces in the past few years went along with progress in instrumentation and data processing. Furthermore, the information contained in the measured spectra can now be read in more detail through comparison with calculations. The availability of sophisticated ab initio quantum-chemical programs and fast computers makes it possible to simulate spectra with predictive accuracy.

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Internal Ceramic Protective Coating of Hollow‐Core Fibers

Jouin,

Thomas,

Orihuel

et al. 2024

Adv Eng Mater

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In order to optimize the use of hollow‐core photonic crystal fibers (HC‐PCF), their cores are filled with an atomic gas for an ultra‐enhanced interaction with an incident laser beam in applications such as atomic vapor microcells. One challenge in these gas‐filled HC‐PCFs is to control the physio‐chemical interactions between the gas medium and the silica inner‐surface of the fiber core‐surround. This work thus focuses on the processing of ceramic coatings on glass substrates by chemical solution deposition. It also describes the successful implementation of an original coating procedure for a deposition inside hollow‐core fibers with complex microstructures. It is indeed possible to form a thin, dense, inorganic and amorphous layer with a low thickness, low roughness and high transparency. To obtain such a result, several parameters must be controlled, including the concentration of the solution, the technique and the deposition time, as well as the heat treatment undergone by the fiber. In particular, the selected aluminosilicate coatings, which are non‐porous and present a 20 to 30 nm thickness, demonstrated a considerable improvement of the lifetime properties of the fibers filled with rubidium vapor, without modifying its original guiding properties.This article is protected by copyright. All rights reserved.

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Properties of alumina films prepared by atmospheric pressure metal-organic chemical vapour deposition

Cited by 29 publications

References 17 publications

Properties of alumina films prepared by metal-organic chemical vapour deposition at atmospheric pressure in the presence of small amounts of water

Properties of alumina films prepared by metal-organic chemical vapour deposition at atmospheric pressure in the presence of small amounts of water

Probing Catalytic Solid-Liquid Interfaces by Attenuated Total Reflection Infrared Spectroscopy: Adsorption of Carboxylic Acids on Alumina and Titania

Internal Ceramic Protective Coating of Hollow‐Core Fibers

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