Properties of aluminum oxynitride films prepared by reactive magnetron sputtering

Borisova, A.; Babych, B.; Machulyansky, A.; Rodionov, M.; Yakymenko, Yuriy

doi:10.1109/elnano.2014.6873942

Cited by 5 publications

(5 citation statements)

References 3 publications

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“…1 shows the dispersion dependences of α 1Ni and α 2Ni of a model spherical particle, with properties of "bulk" (in macroscopic volumes) of nickel. α 1Ni and α 2Ni calculated from the formulas (5)(6)(7)(8) and the data on n and k for nickel in the macroscopic volumes contained in [18].…”

Section: Resultsmentioning

confidence: 99%

“…These applied and fundamental aspects cause considerable attention to the study of the optical properties of nickel nanoparticles. As a rule [1], [7], when solving problems of developing nanocomposite systems and optimizing their characteristics, the optical parameters of nickel nanoparticles are identified with the optical parameters characteristic for nickel in macroscopic volumes. It is obvious that in this case the optical parameters of nickel nanoparticles should not depend on their size.…”

Section: Introductionmentioning

confidence: 99%

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Optical properties of nickel nanoparticles in systems with a statistically inhomogeneous structure

Machulianskyi

2018

Mìkrosist. elektron. akust.

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The analysis and further development of the experimental-analytical approach for determining the values of the optical parameters of nanosized particles for a system with a statistically inhomogeneous structure is presented. An improved experimental-analytical method for determining the complex specific electric polarizability of nanosized particles in systems with a statistically inhomogeneous structure is based on spectrophotometric and electron-microscopic measurements on two-dimensional structures and application of analytical solution of Rosenberg's spectrophotometric equations with the consideration of analysis of particle size distribution.Experimental spectrophotometric and electron-microscopic studies of nickel islet films with weight thickness from 0.3 nm to 2.0 nm deposited by high-vacuum sputtering on quartz substrates in the range of the spectrum 0.2 ÷ 1, 1 μm are performed. Islands nickel film presented morphological microstructure in the form of monolayers isolated from each other nanoislands spherical surface nickel concentration (0.8 ÷ 2.0) • 10 12 cm -2 and an average particle diameter 2.5 ÷ 7 nm.The optical characteristics, namely, the complex specific electric polarizability, optical electric conductivity of nanosized nickel particles are determined in the spectral range 0.2 ÷ 1.1 μm with the help of the improved experimental-analytical method. A significant increase to one order of magnitude of the absolute values of complex specific electric polarizability of nickel particles with a decrease in their size and in comparison with absolute values of complex specific electric polarizability of model spheres with refractive index and absorption index of nickel in macroscopic volumes was revealed. It is established that in the spectral dependences of optical electric conductivity of nickel nanoparticles in the range 0.2 ÷ 1.1 μm there is a band that diminishing size is shifted to a high-frequency region. In this case, the value of optical electric conductivity of nickel nanoparticles monotonically decreases with a decrease in the size by 1-2 orders of magnitude. Comparison of the obtained values of optical electric conductivity of particles in the range of the considered interval with the values of optical electric conductivity of macroscopic samples of nickel in the studied range of the spectrum shows that in particles the value of optical electric conductivity is 2-3 orders of magnitude smaller than that of bulk metals. It is shown that in the nanoparticles of nickel absorption of "Drude" type in the near infrared region the spectrum is suppressed. The reason for this phenomenon may be the change of the mechanism of low-frequency electromagnetic response in nanosized metal particles in comparison with macroscopic metals.The research results are of interest for the development and optimization of nanostructured systems with the inclusion of nanosized nickel particles and functional devices based on them with given electromagnetic characteristics.Ref. 22, fig. 4.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Optical properties of nickel nanoparticles in systems with a statistically inhomogeneous structure

Machulianskyi

2018

Mìkrosist. elektron. akust.

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“…Такие структуры могут быть реализованы в виде наноразмерных монослоев алюминия с защитными просветляющими слоями оксида или нитрида алюминия. Из работ [7,8] следует, что методом реактивного ионно-плазменного распыления алюминия путем варьирования технологических режимов синтеза можно формировать пленки различного состава: нитрид алюминия AlN, оксинитрид алюминия Al x O y N z и оксид алюминия Аl 2 O 3 .…”

Section: анализ литературных данных и постановка проблемыunclassified

“…В исследуемых нами диэлектрических компонентах при отсутствии поглощения j j n n * λ λ = , и немагнитного метала (алюминий) i 1 * µ = . В соответствии с [7,8] монохроматические энергетические коэффициенты пропускания T λ и отражения R λ со стороны покрытия для неполяризованного света представляются выражениями:…”

Section: методика расчета параметров спектрально селективных характеристик металлодиэлектрических структурunclassified

“…Численные расчеты проводились на основе оптических параметров тонких пленок нитрида алюминия и оксида алюминия, полученных авторами методом реактивного магнетронного распыления и представленные в работе [8].…”

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Development of aluminium-based metal-dielectric structures with energy-saving properties

Borisova¹,

Вербицкий²,

Мачулянский³

et al. 2014

EEJET

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Досліджено спектрально-селективні характеристики прозорих металодіелектричних структур з енергозберігаючими властивостями на основі нанорозмірних шарів алюмінію. Встановлено, що покриття на основі алюмінію з товщинами до 5 нм мають низькоемісійні властивості, а з товщинами більше 20 нм -рефлекторні властивості. Надано рекомендації щодо практичної реалізації структур з енергозберігаючими властивостями Ключові слова: металодіелектричні структури, нанорозмірні шари, спектрально-селективні характеристики, енергозбереження, чисельне моделювання Исследованы спектрально-селективные характеристики прозрачных металлодиэлектрических структур с энергосберегающими свойствами на основе наноразмерных слоев алюминия. Установлено, что покрытия на основе алюминия с толщинами до 5 нм обладают низкоэмиссионными свойствами, а с толщинами более 20 нм -рефлекторными свойствами. Предложены рекомендации по практической реализации структур с энергосберегающими свойствами Ключевые слова: металлодиэлектрические структуры, наноразмерные слои, спектрально-селективные характеристики, энергосбережение, численное моделирование

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Energy-efficient optically transparent coating based on a metal-dielectric composites

Borisova

Babych

Verbitskiy

et al. 2015

2015 IEEE 35th International Conference on Electronics and Nanotechnology (ELNANO)

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Properties of aluminum oxynitride films prepared by reactive magnetron sputtering

Cited by 5 publications

References 3 publications

Optical properties of nickel nanoparticles in systems with a statistically inhomogeneous structure

Optical properties of nickel nanoparticles in systems with a statistically inhomogeneous structure

Development of aluminium-based metal-dielectric structures with energy-saving properties

Energy-efficient optically transparent coating based on a metal-dielectric composites

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