2023
DOI: 10.1002/pssr.202300410
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Properties of Black Silicon Layers Fabricated by Different Techniques for Solar Cell Applications

Gagik Ayvazyan,
Karen Ayvazyan,
Levon Hakhoyan
et al.

Abstract: Black silicon (BS) layers coated with passivation films are widely used as antireflective frontal surfaces for solar cells. The most common BS fabrication techniques are reactive ion etching (RIE), metal‐assisted chemical etching, and laser‐induced processing. Herein, the structural and optical properties, as well as the minority carrier lifetime, of BS are compared with and without atomic layer deposited HfO2 passivation films produced by the above formation methods. The antireflection behavior of the samples… Show more

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