“…The growth of compound thin films from component molecular beams has been described by many investigators (Gunther, 1968;Smith and Pickhardt, 1975;Faurie et al, 1983Faurie et al, , 1985Chow and Johnson, 1985;Jansen and Melnyk, 1984;Foxon, 1983;Kawabe and Matsiura, 1984;Myers et al, 1982;Summers et al, 1984) with general agreement that the conversion or utilization of one species and the film composition vary with the substrate temperature and flux of the other components. A simplified description of the generally accepted mechanisms that explain this behavior follows.…”