Properties of coatings based on cerium dioxide produced by magnetron sputtering

Abstract

The unique set of properties of coatings based on CeO2 has long been used in many industries. But the range of their potential application is no less wide, especially in view of the discovery of new properties. Magnetron deposition technology expands the area of possible application of coatings based on CeO2, making it possible to obtain products of various sizes and geometries. This review presents the parameters of magnetron sputtering of coatings based on cerium dioxide, their relationship with the structure and key properties of these coatings. The influence of the type of target, the introduction of oxygen into the sputtering medium, changes in the sputtering power, bias voltage, type of substrate and its temperature on the structure, mechanical properties, and hydrophobicity are considered.