Properties of Crn and (Ti, Al)N Coatings Produced by High Rate Sputter Deposition

Münz, W.‐D.; Göbel, Jesse

doi:10.1179/sur.1987.3.1.47

Cited by 43 publications

(5 citation statements)

References 7 publications

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“…fcc-TM 1−x Al x N), exhibit considerable improvements of mechanical and chemical properties as compared with their binary counterparts. Here, particularly Ti 1−x Al x N and more recently Cr 1−x Al x N [1][2][3][4][5][6], which can be synthesized by physical vapour deposition in their cubic metastable state, have found widespread applications as protective coatings in advanced machining [7][8][9][10][11], as wear and corrosion resistant coatings for different tools [12][13][14][15][16], or in electronic devices [17].…”

Section: Introductionmentioning

confidence: 99%

Experimental and computational study on the phase stability of Al-containing cubic transition metal nitrides

Rovere

Mušić

Ershov

et al. 2010

J. Phys. D: Appl. Phys.

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The phase stability of Al-containing cubic transition metal (TM) nitrides, where Al substitutes for TM (i.e. TM1−x Al x N), is studied as a function of the TM valence electron concentration (VEC). X-ray diffraction and thermal analyses data of magnetron sputtered Ti1−x Al x N, V1−x Al x N and Cr1−x Al x N films indicate increasing phase stability of cubic TM1−x Al x N at larger Al contents and higher temperatures with increasing TM VEC. These experimental findings can be understood based on first principle investigations of ternary cubic TM1−x Al x N with TM = Sc, Ti, V, Cr, Y, Zr and Nb where the TM VEC and the lattice strain are systematically varied. However, our experimental data indicate that, in addition to the decomposition energetics (cubic TM1−x Al x N → cubic TMN + hexagonal AlN), future stability models have to include nitrogen release as one of the mechanisms that critically determine the overall phase stability of TM1−x Al x N.

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Section: Introductionmentioning

confidence: 99%

Experimental and computational study on the phase stability of Al-containing cubic transition metal nitrides

Rovere

Mušić

Ershov

et al. 2010

J. Phys. D: Appl. Phys.

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“…Thin films of chromium nitride have aroused technical interest recently [3]. By way of an example, thin CrN films having values of microhardness comparable to those of TiN [4] are easier to deposit by reactive magnetron sputtering, which is a common technique in thin film production: CrN is formed over a larger range of nitrogen partial pressures. This implies a significant simplification in process control [5].…”

Section: Introductionmentioning

confidence: 99%

Oxidation of thin chromium nitride films: kinetics and morphology

Kacsich

Lieb

Schaper

et al. 1996

J. Phys.: Condens. Matter

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Magnetron-sputtered, 150 - 500 nm thick chromium nitride films of CrN and stoichiometry were exposed to air at 500 - . Oxide scale growth and morphology and the phase transformations during oxidation were investigated by means of Rutherford backscattering spectrometry, resonant nuclear reaction analysis, scanning force microscopy (SFM) and x-ray diffraction. A combined logarithmic and parabolic scale growth was found and interpreted as due to inwards diffusion of oxygen via grain boundaries (logarithmic) and outwards lattice diffusion of Cr (parabolic). Pt-marker experiments confirmed this interpretation. The activation energies of the two processes were determined to be Q = 60(20) and . During oxidation of a transformation into CrN was observed. A linear increase in the surface roughness and surface grain size with the oxide layer thickness was found by SFM.

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“…To date, only a small part of the types of nanomaterials have been practically realized -nanostructured nickel foil, soft magnetic alloy "Finmet", multilayer semiconductor heterostructures, superhard nitride films, etc. (see, for example, [1][2][3][4][5][6]). These are mainly the results of the manifestation of size effects, and the ideas [7][8][9][10] are still awaiting their full practical implementation.…”

Section: Introductionmentioning

confidence: 99%

Current status and trends in the physicochemical properties of nanomaterials and nanotechnology researches

2022

ijp

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According to the estimates of many authors, in 10-15 years, the world market for nanotechnology products will amount to about 1 trillion $. The share of nanomaterials, in this case, is very large (about 340 billion). Therefore, research on nanomaterials properties becomes one of the most important tasks of the science of nanostructured materials. In this regard, it will be essential to expand research on the influence of size and thermal stability; as two common problems for almost all types of nanomaterials. This review article will discuss the most popular topics on nanomaterials, nanostructures, their history, characteristics and classification as well as status of their scientific articles published in recent years. This study focuses on a range of topics related to the development, research and manufacturing applications of nanomaterials and nanotechnology. There are many problems and challenges that scientists are investigating on them. For example: what are the main differences between the properties of interfaces of nanomaterials (including hybrid ones) from the characteristics of ordinary bulk states? How widely can the self-assembly technique of nanoscale devices elements be developed, considering possible installation errors?

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Properties of Crn and (Ti, Al)N Coatings Produced by High Rate Sputter Deposition

Cited by 43 publications

References 7 publications

Experimental and computational study on the phase stability of Al-containing cubic transition metal nitrides

Experimental and computational study on the phase stability of Al-containing cubic transition metal nitrides

Oxidation of thin chromium nitride films: kinetics and morphology

Current status and trends in the physicochemical properties of nanomaterials and nanotechnology researches

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