2012
DOI: 10.7567/jjap.51.046202
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Properties of Inductively Coupled Radio Frequency CH4/H2Plasmas: Experiments and Global Model

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“…The reaction equations and the corresponding rate coefficients are presented in the Supporting Information. The majority of electron collision reaction rate coefficients are calculated by BOLSIG+ using the cross sections from the online database LXCat. The other reaction rate coefficients are taken from the literature. ,,, …”
Section: Methodsmentioning
confidence: 99%
“…The reaction equations and the corresponding rate coefficients are presented in the Supporting Information. The majority of electron collision reaction rate coefficients are calculated by BOLSIG+ using the cross sections from the online database LXCat. The other reaction rate coefficients are taken from the literature. ,,, …”
Section: Methodsmentioning
confidence: 99%