Properties of Iridium Thin Films Fabricated by Atomic Layer Deposition

Zhijie, 叶志杰 Ye; Weidong, 沈伟东 Shen; Yueguang, 章岳光 Zhang; Xing, 张 兴 Zhang; Wenjia, 袁文佳 Yuan; Yanghui, 李旸晖 Li; Xu, 刘旭 Liu

doi:10.3788/aos201434.1031002

光学学报

2014

DOI: 10.3788/aos201434.1031002

|View full text |Cite

Properties of Iridium Thin Films Fabricated by Atomic Layer Deposition

叶志杰 Ye Zhijie¹,

沈伟东 Shen Weidong²,

章岳光 Zhang Yueguang³

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2022

Publication Types

Select...

Article1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Study on total reflection performance of films grown by atomic layer deposition relevant to X-ray reflective optics

Zhang

et al. 2022

Appl. Opt.

View full text Add to dashboard Cite

For X-ray reflective optics that work based on the concept of total external reflection, coating the reflector surface with high-density film is a common idea to enhance performance. Atomic layer deposition (ALD) has been proven to be a promising way to coat the reflector surface with a large curvature, even the inner surface of an X-ray capillary. In this paper, H f O 2 and iridium films were prepared on flat silicon and glass substrates via ALD, and X-ray reflectivity (XRR) was used as a main tool to investigate the effect of film properties on the total reflection performance.

show abstract

Study on total reflection performance of films grown by atomic layer deposition relevant to X-ray reflective optics

Zhang

et al. 2022

Appl. Opt.

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Properties of Iridium Thin Films Fabricated by Atomic Layer Deposition

Cited by 1 publication

References 0 publications

Study on total reflection performance of films grown by atomic layer deposition relevant to X-ray reflective optics

Study on total reflection performance of films grown by atomic layer deposition relevant to X-ray reflective optics

Contact Info

Product

Resources

About