Properties of ITO films deposited by r.f.-PERTE on unheated polymer substrates—dependence on oxygen partial pressure

Interdigital sensors and transducers

“…The bulk of the polymeric substrate can be made conductive by introducing carbon fibers [60], doping, and addition of other conducting materials [61]. To obtain a conductive coating on a polymer substrate, metal alloys such as tin oxide SnO [62], zinc oxide (ZnO) [62], and indium tin oxide (ITO) [63] are sputtered or plasma deposited. The coating is then patterned using standard etching techniques to form electrodes of desired dimensions.…”

Properties of ITO films deposited by plasma enhanced RTE on unheated polymer sheets – dependence on rf electrode distance from substrates

“…Indium tin oxide films were deposited by radio frequency (rf) plasma enhanced reactive thermal evaporation (rf-PERTE) of an 90%In:10%Sn alloy in the presence of oxygen, at room temperature, using the conventional evaporation arrangement [7]. A Balzers tungsten crucible (ref.…”

Symmetric Compound Parabolic Concentrator with Indium Tin Oxide Coated Glass as Passive Cooling System for Photovoltaic Application

“…In the literature, there are various deposition techniques that have been used to grow ITO films which includes chemical vapour deposition [19], reactive plating [26], electron beam evaporation [19,20], pulsed laser deposition [27], spray pyrolysis [18,19], sol-gel [19,28], thermal deposition [22], DC magnetron sputtering [19,21,24], and radio frequency (rf) magnetron sputtering [19,[30][31][32]. However, each of the ITO films deposition techniques has its own advantages and disadvantages.…”