Properties of ITO films deposited on paper sheets using a low-frequency (60 Hz) DC-pulsed magnetron sputtering method

Kim, Hong Tak; Jung, Sang Kooun; Lee, Sung-Youp

doi:10.1016/j.vacuum.2021.110056

Cited by 13 publications

(12 citation statements)

References 14 publications

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“…There are several types of magnetron sputtering deposition techniques that can be used to deposit thin films, including direct current (DC) magnetron sputtering, radio-frequency (RF) magnetron sputtering, mid-frequency (MF) magnetron sputtering, and high-power impulse (HiPIMS) magnetron sputtering. In DC magnetron sputtering, a constant voltage is applied to the target material, which generates a stable plasma for deposition [ 47 ]. RF magnetron sputtering involves the use of a radio-frequency generator to create an oscillating electric field in the chamber, which increases the ionization of the plasma and enhances the deposition rate [ 18 , 48 ].…”

Section: Magnetron Sputtering Deposition Of Hydrophobic Thin Filmsmentioning

confidence: 99%

Review on Hydrophobic Thin Films Prepared Using Magnetron Sputtering Deposition

et al. 2023

Materials

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Hydrophobic thin films have gained significant attention due to their broad applications in self-cleaning, anti-corrosion, anti-icing, medicine, oil–water separation, and other fields. The target hydrophobic materials can be deposited onto various surfaces thanks to the scalable and highly reproducible nature of magnetron sputtering, which is comprehensively overviewed in this review. While alternative preparation methods have been extensively analyzed, a systematic understanding of hydrophobic thin films fabricated using magnetron sputtering deposition is still absent. After outlining the fundamental mechanism of hydrophobicity, this review briefly summarizes three types of sputtering-deposited thin films that originate from oxides, polytetrafluoroethylene (PTFE), and diamond-like carbon (DLC), respectively, primarily focusing on the recent advances in their preparation, characteristics, and applications. Finally, the future applications, current challenges, and development of hydrophobic thin films are discussed, and a brief perspective on future research directions is provided.

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Section: Magnetron Sputtering Deposition Of Hydrophobic Thin Filmsmentioning

confidence: 99%

Review on Hydrophobic Thin Films Prepared Using Magnetron Sputtering Deposition

et al. 2023

Materials

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“…This study investigated the antibacterial effect induced by the formation of a carbon-nitride (CN) layer on the NW-PP fabric. The CN layer was formed on the NW-PP fabrics using a modified DC-pulsed sputtering, which has been shown to minimize substrate damage [ 16 , 17 ]. The main strategy for acquiring the antibacterial effect was to use the porous structure of NW-PP fabrics and modify their surfaces to convert a C–C bond to a C–N bond.…”

Section: Introductionmentioning

confidence: 99%

Antibacterial Effects of a Carbon Nitride (CN) Layer Formed on Non-Woven Polypropylene Fabrics Using the Modified DC-Pulsed Sputtering Method

Sohn

Jung²,

Lee

et al. 2023

Polymers

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In the present study, the surface of non-woven polypropylene (NW-PP) fabric was modified to form CN layers using a modified DC-pulsed (frequency: 60 kHz, pulse shape: square) sputtering with a roll-to-roll system. After plasma modification, structural damage in the NW-PP fabric was not observed, and the C–C/C–H bonds on the surface of the NW-PP fabric converted into C–C/C–H, C–N(CN), and C=O bonds. The CN-formed NW-PP fabrics showed strong hydrophobicity for H2O (polar liquid) and full-wetting characteristics for CH2I2 (non-polar liquid). In addition, the CN-formed NW-PP exhibited an enhanced antibacterial characteristic compared to NW-PP fabric. The reduction rate of the CN-formed NW-PP fabric was 89.0% and 91.6% for Staphylococcus aureus (ATCC 6538, Gram-positive) and Klebsiella pneumoniae (ATCC4352, Gram-negative), respectively. It was confirmed that the CN layer showed antibacterial characteristics against both Gram-positive and Gram-negative bacteria. The reason for the antibacterial effect of CN-formed NW-PP fabrics can be explained as the strong hydrophobicity due to the CH3 bond of the fabric, enhanced wetting property due to CN bonds, and antibacterial activity due to C=O bonds. Our study presents a one-step, damage-free, mass-productive, and eco-friendly method that can be applied to most weak substrates, allowing the mass production of antibacterial fabrics.

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“…The sensors can also detect humidity [29,30]. For these applications, the films were optimized by controlling various parameters such as the annealing temperature [31][32][33][34], substrate type [35][36][37][38], deposition method [39][40][41][42][43], and doping [44][45][46][47][48]. Regarding the deposition method, the ITO thin films were most frequently prepared using physical methods.…”

Section: Introductionmentioning

confidence: 99%

Multifunctional Zn-Doped ITO Sol–Gel Films Deposited on Different Substrates: Application as CO2-Sensing Material

et al. 2022

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Undoped and Zn-doped ITO (ITO:Zn) multifunctional thin films were successfully synthesized using the sol–gel and dipping method on three different types of substrates (glass, SiO2/glass, and Si). The effect of Zn doping on the optoelectronic, microstructural, and gas-sensing properties of the films was investigated using X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM), spectroscopic ellipsometry (SE), Raman spectroscopy, Hall effect measurements (HE), and gas testing. The results showed that the optical constants, the transmission, and the carrier numbers were correlated with the substrate type and with the microstructure and the thickness of the films. The Raman study showed the formation of ITO films and the incorporation of Zn in the doped film (ITO:Zn), which was confirmed by EDX analysis. The potential use of the multifunctional sol–gel ITO and ITO:Zn thin films was proven for TCO applications or gas-sensing experiments toward CO2. The Nyquist plots and equivalent circuit for fitting the experimental data were provided. The best electrical response of the sensor in CO2 atmosphere was found at 150 °C, with activation energy of around 0.31 eV.

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Properties of ITO films deposited on paper sheets using a low-frequency (60 Hz) DC-pulsed magnetron sputtering method

Cited by 13 publications

References 14 publications

Review on Hydrophobic Thin Films Prepared Using Magnetron Sputtering Deposition

Review on Hydrophobic Thin Films Prepared Using Magnetron Sputtering Deposition

Antibacterial Effects of a Carbon Nitride (CN) Layer Formed on Non-Woven Polypropylene Fabrics Using the Modified DC-Pulsed Sputtering Method

Multifunctional Zn-Doped ITO Sol–Gel Films Deposited on Different Substrates: Application as CO2-Sensing Material

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