Abstract:3D-structured thin-film batteries draw attention to applications like IoT, wearable, and medical devices because of their having non-flammability, electrochemical stability, and flexibility; furthermore, their capacity density can be enhanced by designing the structure, e.g. the aspect ratio (AR) of trench and pillar structures. For realizing 3D-structured batteries with high-capacity density, the step coverage for high AR-patterned structures is a crucial process parameter. In the case of conventional physica… Show more
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