Properties of magnetron-sputtered electrically insulating Al2O3 coatings on copper

Vuoristo, Petri; Mäntylä, T.; Kettunen, P.

doi:10.1007/bf01105264

Cited by 19 publications

(3 citation statements)

References 20 publications

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“…[7][8][9]22 Argon content is agreed to be high when negative substrate bias is applied, but at zero bias some authors report low argon contents 7 while others find appreciable incorporation. 23 Values of elastic modulus and hardness obtained in the present study are similar to other measurements. 22 Alumina films made by other methods have different properties, for example rf magnetron-sputtered alumina films are deficient in oxygen and contain little argon, 22,23 while rf films sputtered in an argon/oxygen mixture have excess oxygen or are stoichiometric but have little argon.…”

Section: A Films On Smooth Substratessupporting

confidence: 91%

Properties of radio frequency–sputtered alumina films on flat and grooved substrates

Ross¹

1996

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Influence of the target-substrate distance on the properties of indium tin oxide films prepared by radio frequency reactive magnetron sputtering Mechanical and chemical properties of rf-diode sputtered alumina films have been measured as a function of deposition conditions including substrate bias, bias phase, and sputter power. Similar films were deposited over grooved substrates, and the effect of the grooves on film microstructure and intrinsic stress was examined. Films deposited over nonplanar substrates show distinct regions in the vicinity of substrate steps where the material has a different microstructure, composition, stress, and chemical etch rate compared with material far from the steps. The elastic modulus and hardness of the material near the steps were measured by nanoindentation.

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Section: A Films On Smooth Substratessupporting

confidence: 91%

Properties of radio frequency–sputtered alumina films on flat and grooved substrates

Ross¹

1996

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…Nanocrystalline metastable alumina phases (γ, δ, θ, κ, …) can be used as separation membranes [4,5], catalyst [6,7] or catalytic supports [8,9] because of fine particle size, high surface area and good catalytic activity. Alumina coatings (including amorphous alumina) find applications also as optical coatings [10,11] and electrically insulating layers [12,13].…”

Section: Introductionmentioning

confidence: 99%

Thermal stability and transformation phenomena in magnetron sputtered Al–Cu–O films

Zuzjaková

Zeman

Houška

et al. 2015

Ceramics International

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“…1) As a technique to produce coating films, there are methods using CVD and PVD processes. [5][6][7] The CVD includes atomic layer deposition (ALD) while the PVD includes sputtering, dip-coating deposition, spray-coating, electrophoretic deposition, etc. When coating is executed by using sputtering, a high vacuum atmosphere along with a high voltage are necessary, requiring much time and high cost to obtain coating films.…”

Section: Introductionmentioning

confidence: 99%

Preparation and Characterization of Organic-inorganic Hybrid Composite Film with Plate-shaped Alumina by Electrophoretic Deposition as a Function of Aging Time of Sol-Gel Binder

Kim¹,

Park²,

Choi³

et al. 2015

Journal of the Korean Ceramic Society

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Sol-gel binder was prepared by hydrolysis and condensation reaction using boehmite sol and methyltrimethoxysilane as a function of aging-time. The coating slurry was composed of a plate-shape alumina in the sol-gel binder for the EPD process, in which particles dispersed in the slurry were deposited on the electrode under an electric field due to the surface charge. We studied the effects of three parameters: the content of boehmite, the aging time, and the applied voltage, on the physical, thermal, and electrical properties of the hybrid composite films by EPD. The amount of boehmite was 10 ~ 20 wt% and the aging time was 0.5 7 2 , with a fixed amount of plate-shape alumina of 10 wt%. The condition of applied voltage was 5 ~ 30 V with a distance of 2 cm between the electrode during the EPD process. We confirmed that a structure of hybrid composite films of well-ordered plate alumina was deposited on the substrate when the film was prepared using a sol-gel binder composed of 15 wt% boehmite with 1 hr aging time and EPD at 10 V. The process shows a weight loss of 7% at 500 o C in TGA and a breakdown voltage of 8 kV at 87 µm.

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Properties of magnetron-sputtered electrically insulating Al2O3 coatings on copper

Cited by 19 publications

References 20 publications

Properties of radio frequency–sputtered alumina films on flat and grooved substrates

Properties of radio frequency–sputtered alumina films on flat and grooved substrates

Thermal stability and transformation phenomena in magnetron sputtered Al–Cu–O films

Preparation and Characterization of Organic-inorganic Hybrid Composite Film with Plate-shaped Alumina by Electrophoretic Deposition as a Function of Aging Time of Sol-Gel Binder

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