Properties of nanocrystalline and nanocomposite WxZr1−x thin films deposited by co-sputtering

Horwat, David; Dehmas, Moukrane; Aubry, Eric; Zollinger, Julien; Migot, Sylvie; Pierson, J.F.

doi:10.1016/j.intermet.2008.11.020

Cited by 18 publications

(9 citation statements)

References 27 publications

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“…The electrical resistivity values of the optimum CMTS thin films are near to the values of CZTS thin films doped Al obtained by Gadallah et al [52]. The slow decrease of the electrical resistivity is favored by the crystallinity improvement such as the crystallite growth [53], and also by the higher metal enrichment due to the sulfur loss with the temperature increases. Referring to Figure 2b, the band gap energies of the films were deduced by extrapolating the linear portion of the plots to the photon energies axis.…”

Section: Electrical Characterizationsupporting

confidence: 70%

Growth and Characterization of Cu2MnSnS4 Thin Films Synthesized by Spray Pyrolysis under Air Atmosphere

et al. 2020

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The direct synthesis of chalcopyrite Cu2MnSnS4 (CMTS) thin films by a spray pyrolysis technique on glass substrates under oxidative conditions (ambient atmosphere and using compressed air as a carrier gas instead of nitrogen) was studied. The effect of the deposition temperature on the structural, chemical composition, and optical and electrical properties of thin films has been assessed. X-ray diffraction study reveals that the tetragonal stannite structure crystallizes with a [112] preferential orientation from 280 up to 360 °C, with its crystallinity correlated with the substrate temperature. However, in addition to its crystallization, traces of secondary phases are observed: a mixture of SnO and CuO at 360 °C prevails on the formation of CuS at 320 °C. Above 360 °C, the oxidant conditions combined with the loss in sulfur lead to the crystallization of only the tenorite CuO. The crystallization of sulfides by spray pyrolysis under air is possible only at relatively low deposition temperature for which the oxidation rate is inefficient compared to the sulfidation rate. Further optical studies of stannite films indicate a high absorption coefficient toward the visible range (>104 cm−1) and an optical band gap of about 1.64–1.85 eV, also depending on the substrate temperature. The CMTS thin films deposited below 360 °C exhibit a moderate electrical resistivity of about Ω·cm at room temperature. The properties of the stannite films synthesized using a spray pyrolysis technique in ambient air are comparable to those of films obtained by spray pyrolysis with nitrogen carrier gas despite the presence of oxides traces, an increase in the deposition temperature improving the microstructure, and its related optical and electrical properties.

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Section: Electrical Characterizationsupporting

confidence: 70%

Growth and Characterization of Cu2MnSnS4 Thin Films Synthesized by Spray Pyrolysis under Air Atmosphere

et al. 2020

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“…It appeared as a singularity in the optical properties within the explored compositions in sputtered Zr-Mo thin film [22]. A similar situation was observed in Zr-W thin films [23] and, as will be shown, in the case of Ti-O films, suggesting that a general process could be in action, detectable only with very precise variation of the chemical composition.…”

Section: Introductionsupporting

confidence: 66%

“…Nevertheless, this is not something particular for the Zr-Mo system. For example, in sputter-deposited Zr-W thin films, a transition from the amorphous to the crystalline phase was also observed [23]. This transition is illustrated in the X-ray diffractograms shown in Fig.…”

Section: Towardsmentioning

confidence: 80%

Controlling surface morphology by nanocrystalline/amorphous competitive self-phase separation in thin films: Thickness-modulated reflectance and interference phenomena

et al. 2019

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Controlling surface morphology is a key issue for obtaining functional materials with surface-based properties. In this paper, we explore the possibility of using the self-separation of phases as a way of controlling the surface morphology features. We demonstrate using X-ray diffraction and transmission electron microscopy that a competitive self-separation of a nanocrystalline and an amorphous phases occurs in co-sputtered Zr-Mo thin films with a Mo content of 60 at%, corresponding to a composition intermediate to those necessary to form single-phased amorphous and nanocrystalline films. The dependence of the residual stress with the thickness at the biphased composition is discussed in terms of the morphology evolution and a possible mechanism for the self-separation of phases is presented. We show that the self-separation of phases as presented here is not limited to Zr-Mo alloys and can be extended to other systems. By changing the film thickness, it is possible to change the surface morphology of the films at the biphasic composition, due to the competitive growth of the nanocrystalline phase in the amorphous phase. In this way, it was possible to control the surface roughness and, because of this, tuning the film reflectance at a determined wavelength. The occurrence of an interference pattern in the reflectance spectra was discussed and associated to the presence of two different height levels at the film surface.

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“…Furthermore, an anomaly of the deposition rate can be observed in a short range of setpoint between 7 about 67.5 to 75 %. It was already reported that the deposition rate analysis can give evidence of structural changes [46], thus some structural and/or microstructural events could then be expected. preferential orientation of the magnetite phase is observed at low incidence angle and setpoint (77.5 %), while the phase crystallizes along to the [311] direction by increasing the setpoint and the incidence angle.…”

Section: Deposition Rate Of Feox Filmsmentioning

confidence: 94%

Synthesis of iron oxide films by reactive magnetron sputtering assisted by plasma emission monitoring

Aubry

Liu

Dekens

et al. 2019

Materials Chemistry and Physics

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Iron oxide films were synthesized by pulsed-DC magnetron sputtering from a metallic target in Ar and O2 gas mixtures. Plasma emission monitoring was implemented to accurately control the metalto-oxygen ratio in the coating through the chemical state of the iron target. The intensity of the Fe* emission line was maintained at a given value (setpoint) in regulating the introduced oxygen flow rate. In addition, the oxidation rate of the growing film was adjusted by controlling the oxidationto-deposition rate ratio as a function of the position of the substrates relative to the magnetron axis.The iron oxide films were characterized by X-ray diffraction, UV-VIS spectrophotometry, electrical measurement and vibrating sample magnetometry. In addition to the crystallization of 2 pure hematite and magnetite phases, both phases coexist in a transition domain for a short range of setpoint depending on the oxidation-to-deposition rate ratio. The electrical, optical and magnetic behaviors of the FeOx films suggest that the relative proportion of phases can be tailored in this range. The FeOx film behaviors can then be tuned from the hematite semi-conductor properties to the semi-metallic magnetite properties.

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Properties of nanocrystalline and nanocomposite WxZr1−x thin films deposited by co-sputtering

Cited by 18 publications

References 27 publications

Growth and Characterization of Cu2MnSnS4 Thin Films Synthesized by Spray Pyrolysis under Air Atmosphere

Growth and Characterization of Cu2MnSnS4 Thin Films Synthesized by Spray Pyrolysis under Air Atmosphere

Controlling surface morphology by nanocrystalline/amorphous competitive self-phase separation in thin films: Thickness-modulated reflectance and interference phenomena

Synthesis of iron oxide films by reactive magnetron sputtering assisted by plasma emission monitoring

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