Properties of SiCN Films Relevant to Dental Implant Applications

Abstract

The application of surface coatings is a popular technique to improve the performance of materials used for medical and dental implants. Ternary silicon carbon nitride (SiCN), obtained by introducing nitrogen into SiC, has attracted significant interest due to its potential advantages. This study investigated the properties of SiCN films deposited via PECVD for dental implant coatings. Chemical composition, optical, and tribological properties were analyzed by adjusting the gas flow rates of NH3, CH4, and SiH4. The results indicated that an increase in the NH3 flow rate led to higher deposition rates, scaling from 5.7 nm/min at an NH3 flow rate of 2 sccm to 7 nm/min at an NH3 flow rate of 8 sccm. Concurrently, the formation of N-Si bonds was observed. The films with a higher nitrogen content exhibited lower refractive indices, diminishing from 2.5 to 2.3 as the NH3 flow rate increased from 2 sccm to 8 sccm. The contact angle of SiCN films had minimal differences, while the corrosion rate was dependent on the pH of the environment. These findings contribute to a better understanding of the properties and potential applications of SiCN films for use in dental implants.

Enhancing the Hydrophobicity and Antibacterial Properties of SiCN-Coated Surfaces with Quaternization to Address Peri-Implantitis

“…The sample preparation begins by depositing a layer of SiCN, 100 nm in thickness, on a silicon wafer through the use of Plasma Enhanced Chemical Vapor Deposition (PECVD) at a pressure of 900 mTorr, utilizing a processing gas mixture of silane, methane, helium, and ammonia. The concentration of nitrogen in the SiCN layer was varied through adjustments in the flow rate of ammonia and had previously been analyzed using XPS analysis [45]. After the SiCN layer was applied, the samples were cut into 1 cm squares and rinsed with acetone and IPA.…”

Nano mechanics in multicomponent hard coatings for MEMS cantilevers

“…The SiCN was found to have very high hardness and abrasion resistance and was also found to be compatible with stainless steel. It has also been reported to show both metallic and piezoelectric properties and is a good alternative to SiC which only has insulating properties [17][18][19][20]. SiCN As with other hard coatings, nanoindentation is used to determine its mechanical properties.…”

Characteristics of Si (C,N) Silicon Carbonitride Layers on the Surface of Ni–Cr Alloys Used in Dental Prosthetics

“…So far, all research has been based on the use of other elements or a different substrate. Most research focuses primarily on nitrides themselves or oxides such as TiO 2 [29,30]. To date, most of the research work has involved studies on the modification of Ni-Cr alloys coated with Ti (C,N) [22][23][24].…”

“…These coatings have gained recognition due to their very high hardness, as well as wear resistance. Further advantages of these materials are high biocompatibility and the absence of harmful side effects when in direct contact with living tissue [30]. Xinyi Xia and co-authors deposited SiCN coatings by means of the PECVD method, where the gas flow rates of ammonia (NH 3 ), methane (CH 4 ), and silane (SiH 4 ) were precisely defined [29,30].…”