Properties of titanium dioxide films prepared by reactive electron-beam evaporation from various starting materials

Abstract

There is a wide choice of starting materials for the production of titanium dioxide films by reactive electron-beam evaporation. We have investigated the specific merits of these materials in terms of refractive index, stress, and abrasion resistance of the resultant titanium dioxide films. The suboxides TiO, Ti2O3, and Ti3O5 as well as titanium dioxide and titanium metal were reactively evaporated, and titanium dioxide films free of absorption were obtained on substrates at 25 and 250 degrees C. On unheated substrates the refractive index, which varies from 2.06 to 2.22, the stress, and the abrasion resistance all depend on the starting material used. On substrates heated to 250 degrees C the refractive indices of all films lie closely about 2.4, and all films show high tensile stress and good abrasion resistance.

Density-related properties of metal oxide films

“…The dense films with the higher index values show also a higher hardness and a higher abrasion resistance[5,[7][8][9].Tab.2: Mechanical stress of various metal oxid films deposited with different reactive deposition methods by using oxidic starting materials[5][6][7][8][9]. ( -= compressive stress)…”

Optical properties of TiO2 films made by air oxidation of Ti

“…Bragg-Brentano x-ray diffraction was successfully used for phase identification of TiO 2 . As reported in the literature [1][2][3], properties of TiO 2 depended on conditions of film depositions, such as reactive triod sputtering, reactive rf magnetron sputtering, or reactive electron beam evaporation of various starting materials (Ti, TiO, Ti 2 O 3 , Ti 3 O 5 , Ti 4 O 7 ). Furthermore, TiO 2 films have structural complexity which means a) bond flexibility giving rise to polymorphs with the same chemistry and/or similar free energy of formation and b) mixed valence compounds [1].…”

Preparation and optimization of the laser thin film filter

“…And the stress type of SiO 2 and TiO 2 is opposite, thus the two combined materials help to reduce the stress and achieve stable membrane system. Through a lot of experiments, finalize the preparation of SiO 2 and TiO 2 films optimum parameters in the following We must brought the actual refractive index into TFCALC film coating system software design, making practical and simulated multilayer films approach to the maximum extent of spectral curve, which reduces the number of plating experiment [4] . Figure 1 is the curve of refractive index of SiO 2 and extinction coefficient versus wavelength: …”