Title
AbstractIndium doped cadmium oxide (CdO:In) films with different In concentrations were prepared on low-cost glass substrates by pulsed filtered cathodic arc deposition (PFCAD). It is shown that polycrystalline CdO:In films with smooth surface and dense structure are obtained. In-doping introduces extra electrons leading to remarkable improvements of electron mobility and conductivity, as well as improvement in the optical transmittance due to the Burstein-Moss effect. CdO:In films on glass substrates with thickness near 230 nm show low resistivity of 7.23×10 -5 Ωcm, high electron mobility of 142 cm 2 /Vs, and mean transmittance over 80% from 500-1250 nm (including the glass substrate). These high quality pulsed arc-grown CdO:In films are potentially suitable for high efficiency multi-junction solar cells that harvest a broad range of the solar spectrum.
Keywords:In doped cadmium oxide; pulsed filtered cathodic arc deposition; transparent conductors
IntroductionTransparent conducting oxides (TCOs) have attracted much attention due to their tremendous importance in optical and electrical applications such as displays, touch-screens, thin film solar cell technology and for transparent conducting electrodes in general [1,2]. For solar cell applications, high mobility TCO contacts with a sheet resistance of <10 Ω/□ and an optical transmission >80% over the visible to near infrared wavelengths (bandgap >3 eV) can enhance the efficiency [3]. This is particularly effective for multi-junction solar cells which consist of different semiconductor stacks with appropriately matched bandgaps that are tuned to increase the spectral response over the entire solar spectrum [4]. Therefore, in addition to maintaining high conductivity, improving the visible to near infrared transparency of TCO films is of great importance for applications in high performance multi-junction solar cells.