Proposal and realization of V-groove color tunable µLEDs

Abstract

Color tunable micro light emitting diodes (µLEDs) are proposed and realized, making use of V-grooves to vary the Indium content during growth. The V-grooves make use of semi-polar crystal planes and strain relaxation to provide distinct regions of low to high Indium concentration which are simultaneously integrated. The differing Indium content provides emission from 425 to 640 nm. µLEDs ranging from 2 to 500 µm are demonstrated to showcase the concept.

60‐1: Invited Paper: Emerging microdisplay technologies for AR/VR applications

“…Recently, Innovation Semiconductor has proposed a V-groove μLED as shown in Fig. 3(a) [22]. By varying the bias voltage or the current density, holes injected from p-GaN inside the Vgrooves will populate in a different MQW.…”

Color-Tunable Light-Emitting Diodes Based on Rare Earth Doped Gallium Oxide Films

“…Artificial lighting has become ubiquitous and indispensable in modern society. Recently, there has been extensive research on color-tunable light-emitting diodes (LEDs) for applications in augmented and virtual reality displays, indoor lighting, and architectural lighting. − While organic LEDs offer numerous benefits compared to alternative lighting and display technologies, they are susceptible to water damage, exhibit a relatively high cost, and pose challenges in fabrication processes . On the other hand, quantum dot LEDs are extensively used owing to their notable characteristics, including excellent thermal and mechanical stability and tunable emission spectra .…”

P‐163: Late‐News Poster: Demonstration of Color Tunable µLED Passive Matrix

“…V-grooves create regions of low, moderate, and high Indium incorporation by modulating Indium in the multiple quantum wells (MQWs) due to differences in crystal planes and strain. Vgrooves introduce {101 ̅ 1} crystal facets through the MQW region, Figure 2 [19]. MQWs in the {101 ̅ 1} crystal facets contain a low concentration of Indium due to the difference in the crystal orientation [19].…”

“…Vgrooves introduce {101 ̅ 1} crystal facets through the MQW region, Figure 2 [19]. MQWs in the {101 ̅ 1} crystal facets contain a low concentration of Indium due to the difference in the crystal orientation [19]. MQWs near the {101 ̅ 1} crystal facets contain a higher concentration of Indium compared to planar MQWs located further away, due to the reduced strain and free surface provided [19].…”

“…MQWs in the {101 ̅ 1} crystal facets contain a low concentration of Indium due to the difference in the crystal orientation [19]. MQWs near the {101 ̅ 1} crystal facets contain a higher concentration of Indium compared to planar MQWs located further away, due to the reduced strain and free surface provided [19]. By using a high density of V-grooves and a planar MQW region optimized for green emission, color-tunable µLEDs from red to blue can be achieved.…”