Plasma deposition of conjugated polymer films at atmospheric pressure is described. The thiophene derivatives, thiophene, 3-methylthiophene and 3,4-ethylenedioxythiophene were used as monomers. The plasma depositions with the different precursors were compared with analytical techniques such as XPS, FT-IR, UV-VIS and resistance measurements.Good results were obtained with pulsed plasma depositions of poly (3,4-ethylenedioxythiophene). Conductivities up to 1 x 10 -2 S/cm were measured.