150c CȍǶǽڢᕮ⋛ᕧոˁǺǙǠȚɲɻ⓹۰ɩɅএઃȿɲȳǽɟɵɐɻଣҽමʸቆᇏ۠ɿʅறᗱʶȖଉ ɿৃቧ⚼ᅖଉ ɿૈ୮ ኇ̸গકӞᴻᲇકཪ⒈ᮾ᳣Ƀɻɇʀࢫ153-8904 ኇ̸ȩᬶ࠭ٚشई 4-6-1 ଉ ኇ̸ᥴᲇগકకકȤకᏡكકᲇࢫ162-8601 ኇ̸ȩᄽٚᏱ 1-3Silica mesoporous structures incorporated with phosphorus were prepared and their proton conductivity was evaluated at temperatures of up to 150c C under saturated or controlled water vapor pressure. The fixing of phosphoric acid through heat treatment after forming the mesostructure had a limited effect on the improvement in proton conductivity only in a relatively low-temperature region. The incorporation of phosphorus during mesoporous silica formation decreased the surface area but was effective in improving proton conductivity. A sample with a low PSi atomic ratio of 0.07 showed the highest proton conductivity above 10 ࢬ2 Scm ࢬ1 at 100 to 120c C under saturated water vapor pressure. A sample with a high PSi atomic ratio of 0.25 showed relatively high conductivities being maintained even at low relative humidity at 150c C. An adequate phosphorus concentration and a large surface area were found necessary for high and humidity-independent proton conductivity in mesoporous silica.