Proximity-effect induced density limitations for electron-beam patterned planar photonic nanomaterials

Dielectric and hybrid metal-dielectric nanoantennas for fluorescence enhancement

“…Fabricating the stand-alone 4-arm bowtie antenna (see Fig. The most likely explanation is that since the bowtie fabrication process was carried out after the silicon ring was fabricated, meaning that the bowties were fabricated inside existing rings, proximity effects of the existing silicon ring were causing the resist to be overexposed [198,199]. A simple mechanism could be constrained charge draining in the ring region because of the complex topography, or uneven distribution of the charge draining E-Spacer layer could have ended up unevenly spread over the ring structures, decreasing charge draining efficiency.…”