Peak current densities two times higher than the best values reported for GaAs-based resonant tunneling diode ͑RTD͒ structures have been obtained from metal-organic chemical-vapor deposition ͑MOCVD͒-grown deep-quantum-well strained-layer In 0.3 Ga 0.7 As/Al 0.8 Ga 0.2 As RTDs. By growing on nominally exact ͑100͒ ϩ/Ϫ0.1°GaAs substrates, we have been able to obtain smooth interfaces between the strained-layer In 0.3 Ga 0.7 As quantum well and Al 0.8 Ga 0.2 As barriers, which, in turn, enabled us to benefit from resonant tunneling through the second resonant energy level of In 0.3 Ga 0.7 As/Al 0.8 Ga 0.2 As structures. Peak current densities in excess of 300 kA/cm 2 , and peak-to-valley current ratios as high as 3:1, at 300 K, have been obtained from structures with 14-Å-thick barriers and a 57-Å-thick well. © 1997 American Institute of Physics.
͓S0003-6951͑97͒02821-0͔Currently, resonant tunneling diodes ͑RTDs͒ are the widest bandwidth semiconductor devices with gain, which have been used to build microwave oscillators with oscillation frequencies in excess of 700 GHz, 1 trigger circuits operating up to 110 GHz, 2 and a wide range of high-speed logic and switching circuits. 3-5 For the above applications the peak current density ͑PCD͒ and the current peak-to-valley ratio ͑PVR͒ are the two major figures of merit. 2,6 Also, the choice of material system is of great importance. GaAsbased RTDs are favored over GaSb-and InP-based structures for practical applications due to the maturity of growth and material processing techniques as well as the possibility of integration with other high-speed devices. 7 The best reported PCD value for GaAs-based RTDs 8 is 140 kA/cm 2 , achieved from a Schottky-collector AlAs/GaAs structure having a PVR of 2:1. As for RTDs grown by the metal-organicchemical-vapor deposition ͑MOCVD͒ technique, the PCD values reported 9 are at best 96 kA/cm 2 . Here we report on MOCVD-grown GaAs-based RTDs operating at room temperature with PCDs in excess of 300 kA/cm 2 and PVRs as high as 3:1, made possible by resonant tunneling through the second energy level of a deep quantum well in a strainedlayer structure with smooth quantum-well interfaces.The initial measurements done by Broekaert et al., 10 show that, in an In 0.53 Ga 0.47 As/AlAs/InAs structure grown on InP substrate, the PCD for the resonant tunneling through the second energy level is almost ten times greater than the PCD associated with the first energy level for the same structure. However, the peak voltage for the second resonant energy level is so high (ϳ4.1 V) that it makes the use of tunneling through the second level highly impractical for any application. A later report by Mehdi et al. 6 shows that by using a deep quantum well and adjusting the second resonant energy level to the bottom of conduction band, it is possible to obtain higher PCD values at low peak voltages compared to the conventionally designed RTDs. However, PVRs measured for such structures did not exceed 2:1 at room temperature. Reports on GaAs-based strained-layer I...