“…The second and third authors have the same contribution. advanced technologies such as precision metrology, scanning probe microscopy [1]- [7], energy harvesting [8] [9] [10] [11], medical robotics [12] [13], biomechanics research apparatus [14]- [20], orthodontics [21] [22] [23], material [24] [25] [26], structural engineering [27] [28], microfluidic devices [29] [30] [31] [32] [33] and other instruments which need precise actuation. Several different factors limit the precision positioning of PPNP stages, including mechanical vibrations, external disturbances, hysteresis and creep effects, temperature variation, and the cross-coupling of the different axes.…”