Pull-In Retarding in Nonlinear Nanoelectromechanical Resonators Under Superharmonic Excitation

Kacem, Najib; Baguet, Sébastien; Hentz, Sébastien; Dufour, Régis

doi:10.1115/1.4005435

Cited by 25 publications

(10 citation statements)

References 35 publications

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“…In Figure 10 a, the CMUT is actuated with a DC voltage

V. In this case, the increase of the AC voltage from

V up to

V leads to an increase in the hardening effect on the nonlinear behavior of the CMUT, while vibrating slightly below the critical amplitude [ 65 , 66 , 67 , 68 ]. This is due to the fact that the geometric nonlinearities dominate the microplate dynamics.…”

Section: Nonlinear Dynamic Analysismentioning

confidence: 99%

Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers

2018

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In order to investigate the effects of geometric imperfections on the static and dynamic behavior of capacitive micomachined ultrasonic transducers (CMUTs), the governing equations of motion of a circular microplate with initial defection have been derived using the von Kármán plate theory while taking into account the mechanical and electrostatic nonlinearities. The partial differential equations are discretized using the differential quadrature method (DQM) and the resulting coupled nonlinear ordinary differential equations (ODEs) are solved using the harmonic balance method (HBM) coupled with the asymptotic numerical method (ANM). It is shown that the initial deflection has an impact on the static behavior of the CMUT by increasing its pull-in voltage up to 45%. Moreover, the dynamic behavior is affected by the initial deflection, enabling an increase in the resonance frequencies and the bistability domain and leading to a change of the frequency response from softening to hardening. This model allows MEMS designers to predict the nonlinear behavior of imperfect CMUT and tune its bifurcation topology in order to enhance its performances in terms of bandwidth and generated acoustic power while driving the microplate up to 80% beyond its critical amplitude.

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“…In Figure 10 a, the CMUT is actuated with a DC voltage

V. In this case, the increase of the AC voltage from

V up to

Section: Nonlinear Dynamic Analysismentioning

confidence: 99%

Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers

2018

Self Cite

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“…Nevertheless, nonlinearities occur at very low amplitudes may greatly reduce the dynamic range of micro- and nanomechanical resonators and hence the device performances. To make a breakthrough of this limitation and overcome frequency stability issues in MEMS and NEMS resonators, some improvements had been performed concerning the part dealing with nonlinear dynamics [ 111 ], frequency stability [ 257 ] and how to overcome these limitations using nonlinearities cancellation [ 258 , 259 ], superharmonic resonance [ 260 ] and simultaneous resonances [ 261 , 262 ]. A theoretical model presented by Kacem et al .…”

Section: Major Influencing Factorsmentioning

confidence: 99%

“…It provides a novel strategy for NEMS designers that can be used for the enhancement of resonant sensors performances based on the compensation of nonlinearities. In order to compensate for the loss of performance when scaling resonant sensors down to NEMS, it is a challenge to achieve large-amplitude motion of nanomechanical resonators without deteriorating their frequency stability [ 32 , 260 ]. The simultaneous resonances (primary and superharmonic) was used to overcome this limitation, by stabilizing the dynamic behavior of the resonator, which displays reduced dynamic ranges or signal to noise ratio [ 261 ].…”

Section: Major Influencing Factorsmentioning

confidence: 99%

Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

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“…In the linear regime [12], vibrations are limited to small amplitudes which may not exceed thermo-mechanical noise, thus making the detection difficult. Exciting the microbeam in the non-linear regime can improve the sensitivity of detection, as shown by Buks and Yurke [15] [16], but exposes the resonator to pull-in, namely the collapse of the moving structure onto the fixed electrode [17] [18] [19]. Another possibility consists in using higher modes.…”

Section: Introductionmentioning

confidence: 99%

Bifurcation-based micro-/nanoelectromechanical mass detection

et al. 2014

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This paper investigates an alternative mass sensing technique based on nonlinear micro/nanoelectromechanical resonant sensors. The proposed approach takes advantage of multi-stability and bifurcations of the hysteretic frequency responses of the electrostatically-actuated resonator. For this purpose, a reduced-order model is considered. Numerical results show that sudden jumps in amplitude make the detection of a very small mass possible. Moreover, the limit of detection can be set with the value of the operating frequency. However, when operating at fixed frequency, the study of basins of attraction indicates that this bifurcationbased mass detection does not exhibit the expected robustness. A possible improvement is proposed, based on the reinitialization of the system by a forced jump-down on the hysteretic response curve. Using a frequency sweep which varies slowly in sinusoidal form solves the reinitialization problem and enables automatic real-time detection. Finally the added mass is located on the beam by using the resonance at the first two natural frequencies. Keywords N/MEMS • mass sensing • nonlinear dynamics • basin of attraction • bifurcation • detection • quantification • localization

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Pull-In Retarding in Nonlinear Nanoelectromechanical Resonators Under Superharmonic Excitation

Cited by 25 publications

References 35 publications

Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers

Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers

Tunable Micro- and Nanomechanical Resonators

Bifurcation-based micro-/nanoelectromechanical mass detection

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