Pull-in voltage calculation of various shaped micro-cantilevers

Gupta, Kumari Nidhi; Shanmuganantham, T.

doi:10.1109/iccci.2014.6921807

Cited by 1 publication

(2 citation statements)

References 2 publications

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“…' is the nth order trial function satisfying the boundary conditions and ' is the coefficient to be solved. The boundary conditions for a cantilever beam are as follows: (9) For N=1, , , The trial function is given as (10) Substituting Eqs. ( 8) & (10) in Eq.…”

Section: Mathematical Modelling Of Cantilever Beammentioning

confidence: 99%

“…The study of electrostatically actuated RF MEMS cantilever switch discusses how crucial it is to comprehend the actuation voltage specifications for RF MEMS switches in the context of wireless communication systems and optimization of switch design [8]. Calculation of the pull-in voltage for micro-cantilevers with different shapes and a thorough analysis and calculation approach for the pull-in voltage of micro cantilevers with different geometries is studied in [9]. The simulation and evaluation of the actuation voltage of electrostatically actuated RF MEMS switches, specifically in cantilever and fixed-fixed topologies, assuming varying beam characteristics is presented in [10] .A comprehensive analysis of the design considerations and challenges associated with device stability and post pull-in behavior of electrostatic microplate actuators are studied in [11].Development of analytical expressions for the electrostatically actuated curled beam problem and the need for accurate and efficient analysis of curled beam structures in MEMS is presented in [12].…”

Section: Introductionmentioning

confidence: 99%

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Mathematical Modelling of Electrostatically Actuated Cantilever Beams

SRE,

P.A.

2023

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This study presents a mathematical model for an electrostatically actuated cantilever beam using COMSOL Multiphysics and Wolfram Mathematica. The model is used to investigate the pull-in voltage phenomenon, which refers to the voltage required to pull the beam to touch the bottom electrode. The cantilever beam is modeled as a micro-electromechanical system (MEMS) structure and is electrostatically actuated by applying a voltage between the beam and the bottom electrode. The model takes into account the electrostatic forces and the mechanical deflection of the beam. Parametric analysis is performed using COMSOL Multiphysics and then Wolfram Mathematica tool is used to validate the results obtained from the simulations. The mathematical model is developed using Galerkin's method. This study provides insights into the design and optimization of MEMS devices for various applications such as sensors and actuators.

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Section: Mathematical Modelling Of Cantilever Beammentioning

confidence: 99%