“…In a previous study [10], we enhanced the conversion efficiency by a factor of 7 at the 19th harmonic (H19) by using a hollow fiber to make the interaction length longer and evaluated the saturation condition of the harmonic intensity in relation to gas pressure. After the selection of a single harmonic using a time-delay compensated monochromator (TDCM) with the temporal duration preserved [10][11][12][13][14], the output photon fluxes at 23.4, 26.5 29.6, 32.8, and 35.9 eV were 1.8 × 10 9 , 4.0 × 10 9 , 7.1 × 10 9 , 5.7 × 10 9 , and 6.4 × 10 9 photons/s, respectively [10].…”