Pulsed corona plasma source characterization for film deposition on the inner surface of tubes

Abstract

To cite this version:Ramasamy Pothiraja, Nikita Bibinov, Peter Awakowicz. Pulsed corona plasma source characterization for film deposition on the inner surface of tubes. Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43 (49) Abstract. A microplasma jet has been constructed for chemical vapor deposition on inner surface of narrow long tubes and is tested on a quartz tube with the inner diameter of 6 mm and the outer diameter of 8 mm. A long plasma filament (> 100 mm) is generated inside the tube in argon with methane admixture. Depending on the quantity of admixture in argon, the negative as well as the positive corona discharges are ignited. Both modes of plasma are characterized using optical emission spectroscopy. For this purpose, nitrogen is admixed with argon and its emission is used for the determination of gas temperature, electron velocity distribution function, and electron density at various places along the axis of the tube. The formation of active species, like C, C 2 , CH, etc. during the dissociation of methane, is observed through their characteristic emission. The rate of methane dissociation is determined at various places along the axis of the tube during both modes of discharge. Since the chemical kinetics of film growth process is different, different kinds of films are obtained during different modes of discharge.

Characterization of transient discharges under atmospheric-pressure conditions applying nitrogen photoemission and current measurements

“…These can be calculated applying temporary and space averaged plasma parameters. The influence of inhomogeneity of the plasma parameters on calculated excitation (or dissociation) rates by application of OES diagnostics was studied in [9], [22], [6], and a good agreement between space resolved and averaged excitation rates was found in most cases. In emission spectrum of DBD in air, the vibrational bands of 'second positive' (N 2 (C-B)) and 'first negative' (N 2 + (B-X)) systems of nitrogen are observed.…”

Electron density measurements of atmospheric-pressure non-thermal N2 plasma jet by Stark broadening and irradiance intensity methods

“…On the other hand, the irradiance intensity method which relies on the emission intensity can be used to estimate the electron density smaller than 1.0 Â 10 20 /m 3 . 38,39 Moreover, the emission lines of nitrogen are easier to detect than those of H b , especially in a discharge in open air in which hydrogen cannot be added.…”

Plasma-Chemical Kinetics of Film Deposition in Argon-Methane and Argon-Acetylene Mixtures Under Atmospheric Pressure Conditions

“…The pulsed filamentary discharge is ignited (Pothiraja et al, 2010(Pothiraja et al, , 2011 in the mixture of argon and methane or acetylene precursor (figure 3). This discharge is similar to a positive streamer discharge in argon (Veldhuizen et al, 2002).…”

“…This phenomenon could reduce the film uniformity along the axis of the tube. Our strategy for film coating on inner surface of tubes is to generate long plasma filaments inside the tube in a gas containing a precursor as an admixture (Pothiraja et al, 2010). The plasma filament, which will be thinner than the diameter of the tube to be coated, will be active for long distance in the region of film coating.…”