1998
DOI: 10.1016/s0257-8972(97)00660-9
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Pulsed laser deposition of ceramic thin films using different laser sources

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Cited by 17 publications
(5 citation statements)
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“…[2][3][4][5] Conventional fabrication methods, such as tape casting, allow preparing ceramic packages and film capacitors with different thicknesses (1-3000 μm), but still require high sintering temperatures. 6 In addition, economic considerations limit the use of lower temperature thin film production techniques, such as sol gel, sputtering, chemical vapor deposition, or pulsed laser deposition, 7 due to the slow deposition rate and high levels of residual stress introduced during the fabrication process. 8,9 Therefore, near room-temperature processes, such as cold sintering, 10 cold spraying, 5 and aerosol deposition (AD), 11 have received growing attention.…”
Section: Introductionmentioning
confidence: 99%
“…[2][3][4][5] Conventional fabrication methods, such as tape casting, allow preparing ceramic packages and film capacitors with different thicknesses (1-3000 μm), but still require high sintering temperatures. 6 In addition, economic considerations limit the use of lower temperature thin film production techniques, such as sol gel, sputtering, chemical vapor deposition, or pulsed laser deposition, 7 due to the slow deposition rate and high levels of residual stress introduced during the fabrication process. 8,9 Therefore, near room-temperature processes, such as cold sintering, 10 cold spraying, 5 and aerosol deposition (AD), 11 have received growing attention.…”
Section: Introductionmentioning
confidence: 99%
“…Alumina (Al 2 O 3 ), which is a polymorphous material, [142][143][144] can be deposited by chemical and physical vapor deposition (CVD and PVD). [145][146][147][148][149] Furthermore, its chemical inertness 150 under physiological conditions associated with strong wear resistance, and excellent hardness makes it an actractive material in tribological 151,152 and biomaterial applications. 153,154 Joint 155 and hip replacement prostheses 156 are partly made of Al 2 O 3 .…”
Section: Table III Some Advantages and Disadvantages Of Various Dry Coating Techniquesmentioning
confidence: 99%
“…Because of alumina's good chemical [3], dielectric and optical [4], [5], tribological [6], [7] and biomedical [8] properties, it is frequently used as a coating material, which is deposited by both chemical and physical vapour deposition (CVD and PVD). A large variety of deposition techniques like sputtering [9], plasma spraying [10], chemical vapour synthesis [11], dipping and spinning [12] and sol-gel [13] have been approached for obtaining these oxides.…”
Section: Alumina State Of the Artmentioning
confidence: 99%