Pulsed Laser Deposition of Er doped tellurite films on large area

Bouazaoui, Mohamed; Capoen, Bruno; Caricato, Anna Paola; Chiasera, Alessandro; Fazzi, A.; Ferrari, M.; Leggieri, G.; Martino, M.; Mattarelli, Maurizio; Montagna, M.; Romano, Francesco; Tunno, T.; Turrel, S; Vishnubhatla, Krishna Chaitanya

doi:10.1088/1742-6596/59/1/102

Cited by 7 publications

(2 citation statements)

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“…Planar tellurite thin films, on the other hand, constitute the basic building block for on‐chip photonic devices such as waveguide amplifiers, light emitters, flexible photonic components, and acousto‐optical modulators. Multicomponent tellurite films have been prepared using sol–gel processing and laser ablation . Alternatively, radio‐frequency (RF) magnetron reactive sputtering has been extensively used for oxide thin film deposition given its great versatility in controlling film stoichiometry, microstructure, and phase composition via tuning deposition parameters, in particular, oxygen partial pressure .…”

Section: Introductionmentioning

confidence: 99%

Impact of Stoichiometry on Structural and Optical Properties of Sputter Deposited Multicomponent Tellurite Glass Films

Ogbuu

Lin

et al. 2015

J. Am. Ceram. Soc.

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Multicomponent TeO 2 -Bi 2 O 3 -ZnO (TBZ) glass thin films were prepared using RF magnetron sputtering under different oxygen flow rates. The influences of oxygen flow rate on the structural and optical properties of the resulting thin films were investigated. We observed that thin films sputtered in an oxygen-rich environment are optically transparent while those sputtered in an oxygen-deficient environment exhibit broadband absorption. The structural origin of the optical property variation was studied using X-ray diffraction, X-ray photoelectron spectroscopy, Raman Spectroscopy, and transmission electron microscopy which revealed that the presence of under-coordinated Te leads to the observed optical absorption in oxygen-deficient films.P. Lucas-contributing editor Manuscript No. 35815.

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Section: Introductionmentioning

confidence: 99%

Impact of Stoichiometry on Structural and Optical Properties of Sputter Deposited Multicomponent Tellurite Glass Films

Ogbuu

Lin

et al. 2015

J. Am. Ceram. Soc.

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“…Within this approach film glasses having different concentrations can be obtained, as demonstrated by the relatively large number of works reporting the synthesis of good quality Er-doped PNG, oxyfluoride silicate or phospho-tellurite film glasses. [26][27][28][29][30][31] Films deposited under the optimum experimental conditions present good optical properties as it is shown in Fig. 4a, which presents the transmittance of a film glass deposited on fused silica at room temperature from a RE-doped bulk fluorotellurite glass having a composition close to 73.6 TeO 2 -17.6 ZnO-8.8 ZnF 2 :0.7 ErF 3 (mol %).…”

Section: Rare-earth Doped Thin Film Glassesmentioning

confidence: 92%

Pulsed laser deposition of rare-earth-doped glasses: a step toward lightwave circuits

et al. 2016

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Pulsed Laser Deposition (PLD) is used to produce Er-doped lead-niobium germanate (PbO-Nb 2 O 5 -GeO 2 ) and fluorotellurite (TeO 2 -ZnO-ZnF 2 ) thin film glasses. Films having high refractive index, low absorption and large transmission are obtained in a narrow processing window that depends on the actual PLD configuration (O 2 pressure ∼a few Pa, Laser energy density ∼2-3 J cm -2 for the results presented in this work). However, Er-doped thin film glasses synthetized at room temperature using these experimental parameters show poor photoluminescence (PL) performance due to non-radiative decay channels, such as a large OHconcentration. Thermal annealing allows improving PL intensity and lifetime (τ PL ), the latter becoming close to that of the parent Er-doped bulk glass. In addition, the use of alternate PLD from host glass and rare-earth targets allows the synthesis of nanostructured thin film glasses with a controlled rare-earth concentration and in-depth distribution, as it is illustrated for Er-doped PbO-Nb 2 O 5 -GeO 2 film glasses. In this case, PL intensity at 1.53 μm increases with the spacing between Er-doped layers to reach a maximum for a separation between Er-doped layers ≥ 5 nm, while τ PL is close to the bulk value independently of the spacing. Finally, the comparison of these results with those obtained for films grown by standard PLD from Er-doped glass targets suggests that nanostructuration allows reducing rare-earth clustering and concentration quenching effects. Downloaded From: http://proceedings.spiedigitallibrary.org/ on 05/24/2017 Terms of Use: http://spiedigitallibrary.org/ss/termsofuse.aspx Proc. of SPIE Vol. 9744 974402-2 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 05/24/2017 Terms of Use: http://spiedigitallibrary.org/ss/termsofuse.aspx

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Tellurium Oxide Thin Film Waveguides for Integrated Photonics

Madden

2012

Ceramic Transactions Series

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Pulsed Laser Deposition of Er doped tellurite films on large area

Cited by 7 publications

References 10 publications

Impact of Stoichiometry on Structural and Optical Properties of Sputter Deposited Multicomponent Tellurite Glass Films

Impact of Stoichiometry on Structural and Optical Properties of Sputter Deposited Multicomponent Tellurite Glass Films

Pulsed laser deposition of rare-earth-doped glasses: a step toward lightwave circuits

Tellurium Oxide Thin Film Waveguides for Integrated Photonics

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