Pulsed Laser Deposition of Metal Oxide Nanoparticles, Agglomerates, and Nanotrees for Chemical Sensors

Huotari, Joni; Lappalainen, Jyrki; Puustinen, Jarkko; Baur, Tobias; Alépée, Christine; Haapalainen, Tomi; Komulainen, Samuli; Pylvänäinen, Juho; Spetz, Anita Lloyd

doi:10.1016/j.proeng.2015.08.745

Cited by 20 publications

(7 citation statements)

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“…PLD offers many advantages compared to other deposition methods, for example easily controllable film composition by deposition parameters, and a good repetition of stoichiometry of the target material in the films deposited on the substrate. When using nanosecond laser PLD, as in this study, with a high oxygen partial pressure in the deposition chamber, nanoparticle formation starts during the deposition process leading to a highly porous nanostructured layer (Harilal et al, 2003;Infortuna et al, 2008;Huotari et al, 2015). These types of layers are very suitable for gas sensing purposes because of their high specific surface area.…”

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confidence: 97%

Selective detection of naphthalene with nanostructured WO<sub>3</sub> gas sensors prepared by pulsed laser deposition

Leidinger

Huotari

Sauerwald

et al. 2016

J. Sens. Sens. Syst.

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Abstract. Pulsed laser deposition (PLD) at room temperature with a nanosecond laser was used to prepare WO 3 layers on both MEMS microheater platforms and Si/SiO 2 substrates. Structural characterization showed that the layers are formed of nanoparticles and nanoparticle agglomerates. Two types of layers were prepared, one at an oxygen partial pressure of 0.08 mbar and one at 0.2 mbar. The layer structure and the related gas sensing properties were shown to be highly dependent on this deposition parameter. At an oxygen pressure of 0.2 mbar, formation of ε-phase WO 3 was found, which is possibly contributing to the observed increase in sensitivity of the sensor material.The gas sensing performance of the two sensor layers prepared via PLD was tested for detection of volatile organic compounds (benzene, formaldehyde and naphthalene) at ppb level concentrations, with various ethanol backgrounds (0.5 and 2 ppm) and gas humidities (30, 50 and 70 % RH). The gas sensors were operated in temperature cycled operation. For signal processing, linear discriminant analysis was performed using features extracted from the conductance signals during temperature variations as input data.Both WO 3 sensor layers showed high sensitivity and selectivity to naphthalene compared to the other target gases. Of the two layers, the one prepared at higher oxygen partial pressure showed higher sensitivity and stability resulting in better discrimination of the gases and of different naphthalene concentrations. Naphthalene at concentrations down to 1 ppb could be detected with high reliability, even in an ethanol background of up to 2 ppm. The sensors show only low response to ethanol, which can be compensated reliably during the signal processing. Quantification of ppb level naphthalene concentrations was also possible with a high success rate of more than 99 % as shown by leave-one-out cross validation.

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confidence: 97%

Selective detection of naphthalene with nanostructured WO<sub>3</sub> gas sensors prepared by pulsed laser deposition

Leidinger

Huotari

Sauerwald

et al. 2016

J. Sens. Sens. Syst.

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“…This process leads “naturally” to the formation of very stable and pure colloidal NPs suspensions without extra chemicals and toxic residues or waste [ 48 , 49 , 50 ]. Moreover, when the irradiation occurs in a low-pressure gas environment, such nanocrystal clusters can be deposited as a NPs-film coating on substrates [ 51 , 52 ]. By carefully adjusting the irradiation conditions (e.g., wavelength, fluence, repetition frequency), short-pulse lasers can serve as surface texturing tools to create varieties of micro- and nano-motives in view of tissue engineering applications [ 6 , 53 , 54 , 55 , 56 , 57 ].…”

Section: Introductionmentioning

confidence: 99%

Short-Pulse Lasers: A Versatile Tool in Creating Novel Nano-/Micro-Structures and Compositional Analysis for Healthcare and Wellbeing Challenges

et al. 2021

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Driven by flexibility, precision, repeatability and eco-friendliness, laser-based technologies have attracted great interest to engineer or to analyze materials in various fields including energy, environment, biology and medicine. A major advantage of laser processing relies on the ability to directly structure matter at different scales and to prepare novel materials with unique physical and chemical properties. It is also a contact-free approach that makes it possible to work in inert or reactive liquid or gaseous environment. This leads today to a unique opportunity for designing, fabricating and even analyzing novel complex bio-systems. To illustrate this potential, in this paper, we gather our recent research on four types of laser-based methods relevant for nano-/micro-scale applications. First, we present and discuss pulsed laser ablation in liquid, exploited today for synthetizing ultraclean “bare” nanoparticles attractive for medicine and tissue engineering applications. Second, we discuss robust methods for rapid surface and bulk machining (subtractive manufacturing) at different scales by laser ablation. Among them, the microsphere-assisted laser surface engineering is detailed for its appropriateness to design structured substrates with hierarchically periodic patterns at nano-/micro-scale without chemical treatments. Third, we address the laser-induced forward transfer, a technology based on direct laser printing, to transfer and assemble a multitude of materials (additive structuring), including biological moiety without alteration of functionality. Finally, the fourth method is about chemical analysis: we present the potential of laser-induced breakdown spectroscopy, providing a unique tool for contact-free and space-resolved elemental analysis of organic materials. Overall, we present and discuss the prospect and complementarity of emerging reliable laser technologies, to address challenges in materials’ preparation relevant for the development of innovative multi-scale and multi-material platforms for bio-applications.

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“…V 2 O 5 nanostructures (NSs) has been produced by wetchemistry 23 and pulsed laser deposition. 24 But only a small number of groups have investigated the synthesis of vanadium oxide NSs by Pulsed Laser Ablation in Liquids (PLAL). 25,26 PLAL synthesis has several advantages compared to wet-chemistry, the main one is that the surface of the synthesized nanoparticles is totally free of any contaminants i.e.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of naked vanadium pentoxide nanoparticles

et al. 2021

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Pulsed Laser Deposition of Metal Oxide Nanoparticles, Agglomerates, and Nanotrees for Chemical Sensors

Cited by 20 publications

References 2 publications

Selective detection of naphthalene with nanostructured WO<sub>3</sub> gas sensors prepared by pulsed laser deposition

Selective detection of naphthalene with nanostructured WO<sub>3</sub> gas sensors prepared by pulsed laser deposition

Short-Pulse Lasers: A Versatile Tool in Creating Novel Nano-/Micro-Structures and Compositional Analysis for Healthcare and Wellbeing Challenges

Synthesis of naked vanadium pentoxide nanoparticles

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Pulsed Laser Deposition of Metal Oxide Nanoparticles, Agglomerates, and Nanotrees for Chemical Sensors

Cited by 20 publications

References 2 publications

Selective detection of naphthalene with nanostructured WO&lt;sub&gt;3&lt;/sub&gt; gas sensors prepared by pulsed laser deposition

Selective detection of naphthalene with nanostructured WO&lt;sub&gt;3&lt;/sub&gt; gas sensors prepared by pulsed laser deposition

Short-Pulse Lasers: A Versatile Tool in Creating Novel Nano-/Micro-Structures and Compositional Analysis for Healthcare and Wellbeing Challenges

Synthesis of naked vanadium pentoxide nanoparticles

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Selective detection of naphthalene with nanostructured WO<sub>3</sub> gas sensors prepared by pulsed laser deposition

Selective detection of naphthalene with nanostructured WO<sub>3</sub> gas sensors prepared by pulsed laser deposition