Pulsed laser deposition of nanostructured tin oxide films for gas sensing applications

Response to “Comment on ‘Facile strategy and mechanism for orthorhombic SnO2 thin films’” [Appl. Phys. Lett. 94, 186103 (2009)]

“…1 of our paper 4 shows the presence of a significant amount of the amorphous phase. Typical x-ray diffraction spectra of the amorphous phase show a broad convex shape, 5,6 which are very different from that reported in Fig. 1 of our paper.…”

Atomic Layer Deposition of Epitaxial and Polycrystalline SnO2 Films from the SnI4/O2 Precursor Combination

“…Thin films of the material are usually grown by radiofrequency magnetron sputtering, [2,13] although some other techniques, each having its own strong points, have also come into use. These techniques include mid-frequency dual magnetron sputtering, [11] bipolar pulsed magnetron sputtering, [14] direct current magnetron sputtering, [15] dual ion beam sputtering, [16] electron beam evaporation, [10] dual ion beam-assisted electron beam evaporation, [17] pulsed laser deposition, [18] atmospheric environment laser deposition, [19] rheotaxial growth and thermal oxidation, [20] spray pyrolysis, [6] ultrasonic spray pyrolysis, [5] sol-gel dip coating, [21] deposition from aqueous solutions, [22] and a variety of versions of CVD, viz., its atmospheric-pressure, [23] low-pressure, [24] ion beam-induced, [25] plasma-enhanced, [26] laser-induced, [27] photo-induced, [28] and atomic layer-controlled [29] variants. Recently, there has been considerable interest in epitaxial SnO 2 thin films.…”

Fabrication, Structural Characterization and Testing of a Nanostructured Tin Oxide Gas Sensor

“…4). The crystallites observed in the oxidised clusters had cross-sectional areas of between 5 and 500 . Selected area diffraction patterns from the as-deposited and oxidized membrane samples (not shown) could be indexed to metallic Sn and rutile , respectively.…”

“…Physical vapor deposition methods used to produce films include pulsed laser deposition [5], sputtering [6], and evaporation [7]. It is also possible to deposit Sn films in an inert atmosphere, and subsequently transform them into using a thermal annealing process.…”