Pulsed laser deposition of NiMnGa thin films on silicon

Hakola, A.; Heczko, Oleg; Jaakkola, Antti; Kajava, T.; Ullakko, K.

doi:10.1007/s00339-004-2831-7

Cited by 40 publications

(32 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This is sufficient for most applications including PLD of thin films of high-temperature superconductors and other ceramic materials [10]. However, in the case of Ni-Mn-Ga, it has been observed earlier that fluences around 3 J/cm 2 are required for the deposition of ferromagnetic films [3].…”

Section: Beam Shapingmentioning

confidence: 98%

“…We have previously used this method in our PLD system [3,4]; profiles with good uniformity can be achieved, and the sharpness of the aperture edges determines the steepness of the resulting profile as can be seen in Fig. 1.…”

Section: Introductionmentioning

confidence: 95%

“…Ni-Mn-Ga was chosen as the test material because of our previous experience with the deposition and characterization of this material in thin-film form [3,4]. Also, due to the challenging growth process of Ni-Mn-Ga, differences in the physical properties of the deposited films were expected to be attributable to the different beamshaping approaches: In [3,4], the films were deposited using the same PLD setup with the apertured beam of Fig.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Pulsed laser deposition using diffractively shaped excimer-laser beams

et al. 2012

Self Cite

View full text Add to dashboard Cite

Controlling laser-pulse parameters is an important issue in pulsed laser deposition (PLD). In particular, homogenization of laser beams improves the reproducibility of the PLD process by guaranteeing a uniform intensity distribution and a well-defined energy density of the laser spot on the target. We have integrated a beam-homogenization system into our PLD setup, and here we discuss the results and advantages of using such a system. The optical setup is based on diffractive beam-splitter gratings, which produce a 2 × 2-mm 2 flat-top distribution with fluences of the order of 3 J/cm 2 on the target. We demonstrate the applicability of this technique by depositing thin films of ferromagnetic Ni-Mn-Ga shape-memory alloys. Magnetic and structural characterization, including secondary ion mass spectrometry (SIMS), indicate that nearly stoichiometric composition and crystallization in the desired martensitic phase is obtained for films deposited on Al 2 O 3 under optimal conditions. In contrast, the formation of silicide compounds at temperatures above 500 • C is detrimental in the deposition of Ni-Mn-Ga films directly on silicon.V. Kekkonen ( ) · T. Kajava

show abstract

Section: Beam Shapingmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Pulsed laser deposition using diffractively shaped excimer-laser beams

et al. 2012

Self Cite

View full text Add to dashboard Cite

show abstract

“…Such materials include NiMnGa [2] and other alloys [3][4][5][6][7][8] and are produced by a large variety of techniques, such as arc melting [9], melt-spinning [10,11], sputtering [12][13][14] and Pulsed Laser Deposition (PLD) [15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Magnetically Anisotropic Ni<sub>2</sub>MnGa Thin Films: Coating Glass and Si Micro-Cantilevers Substrates

Madurga

Favieres

Vergara

2009

MSF

View full text Add to dashboard Cite

Abstract. Ni 2 MnGa thin films, with thickness between 30 and 60 nm, were pulsed-laser deposited at room temperature on Si micro-cantilevers and glass substrates. Two different deposition processes were performed: normal deposition and off-normal. After annealing in an inert atmosphere, in-plane isotropic magnetic hysteresis loops were measured for the normal deposited films. In contrast, in-plane anisotropic hysteresis loops were obtained from the off-normal deposited ones. An in-plane easy direction for the magnetisation, perpendicular to the incidence plane of the plasma during deposition, was measured with an anisotropy field of ≈100 Oe and an easy coercive field of ≈24 Oe. The mechanical behaviour of the magnetically anisotropic coated micro-cantilevers and their response to a decreasing temperature permitted observing the martensitic transformation of the Ni 2 MnGa thin films.

show abstract

“…Various approaches have been undertaken in an attempt to fabricate films: flash-evaporation of alloy powders, 16 thermal co-evaporation, 17 molecular beam epitaxy (MBE), 18 and pulsed laser deposition (PLD). 19,20 However, the fabrication of films with desirable characteristics remains a technological challenge. The successful synthesis of epitaxial Ni-Co-Mn-In Heusler alloy with the characteristic behavior of bulk alloys has been recently reported by Niemann et al 21,22 The result was obtained by sputtering from a pre-synthesized target onto a MgO substrate with an epitaxial chromium seed layer.…”

mentioning

confidence: 99%

Evidence of martensitic phase transitions in magnetic Ni-Mn-In thin films

Sokolov¹,

Zhang²,

Dubenko

et al. 2013

Applied Physics Letters

View full text Add to dashboard Cite

Ni50Mn35In15 Heusler alloy thin films (with thicknesses of about 10 nm) have been grown on single crystal MgO and SrTiO3 (STO) (100) substrates using a laser-assisted molecular beam epitaxy method. Films of mixed austenitic and martensitic phases and of pure martensitic phase have been detected for those grown on MgO and STO substrates, respectively. Thermomagnetic curves were measured using a SQUID magnetometer and are consistent with those of off-stoichiometric In-based bulk Heusler alloys, including a martensitic transition at T = 315 K for films grown on MgO. The differences in the properties of the films grown on MgO and STO are discussed.

show abstract

Pulsed laser deposition of NiMnGa thin films on silicon

Cited by 40 publications

References 18 publications

Pulsed laser deposition using diffractively shaped excimer-laser beams

Pulsed laser deposition using diffractively shaped excimer-laser beams

Magnetically Anisotropic Ni<sub>2</sub>MnGa Thin Films: Coating Glass and Si Micro-Cantilevers Substrates

Evidence of martensitic phase transitions in magnetic Ni-Mn-In thin films

Contact Info

Product

Resources

About